Rajesh Tiwari - Plano TX, US Russell Fields - Richardson TX, US Scott Boddicker - Plano TX, US Andrew Kim - Plano TX, US
International Classification:
H01L021/44
US Classification:
438118000
Abstract:
A trench is formed in a low K dielectric () over a plurality of vias () also formed in the low K dielectric layer (). The vias are separated by a distance of less than Xand the edge of the trench is greater than Xfrom the edge α of the via closest to the edge of the trench. The trench and vias are subsequently filled with copper (), () to form the interconnect line.
Dual Depth Trench Termination Method For Improving Cu-Based Interconnect Integrity
Rajesh Tiwari - Plano TX, US Russell Fields - Richardson TX, US Scott A. Boddicker - Plano TX, US Andrew Tae Kim - Plano TX, US
Assignee:
TEXAS INSTRUMENTS INCORPORATED - Dallas TX
International Classification:
H01L 23/532 H01L 23/48 H01L 23/522
US Classification:
257758, 257762, 257E23145, 257E23161, 257774
Abstract:
A trench is formed in a low K dielectric () over a plurality of vias () also formed in the low K dielectric layer (). The vias are separated by a distance of less than Xand the edge of the trench is greater than Xfrom the edge α of the via closest to the edge of the trench. The trench and vias are subsequently filled with copper () to form the interconnect line.
Integrated Circuits Having Dielectric Layers Including An Anti-Reflective Coating
- Dallas TX, US David Matthew CURRAN - Plano TX, US Stephen Arlon MEISNER - Allen TX, US Bhaskar SRINIVASAN - Allen TX, US Guruvayurappan S. MATHUR - Plano TX, US Scott William JESSEN - Allen TX, US Shih Chang CHANG - Allen TX, US Russell Duane FIELDS - Richardson TX, US Thomas Terrance LYNCH - Allen TX, US
International Classification:
H01L 49/02
Abstract:
In some examples, an integrated circuit comprises a substrate; a first metal layer and a second metal layer positioned above the substrate; a first composite dielectric layer located on the first metal layer, wherein the first composite dielectric layer comprises a first anti-reflective coating; a second composite dielectric layer positioned on the second metal layer, wherein the second composite dielectric layer comprises a second anti-reflective coating; and a capacitor metal layer disposed over the first composite dielectric layer.
2009 to 2000 Business ManagerHALLIBURTON ENERGY SERVICES Odessa, TX 2008 to 2009 Business Development Field SalesCENTURY BANK Dallas, TX 2006 to 2007 Branch Manager / Branch Sales MarketerALCATEL USA Plano, TX 1998 to 2001 Systems Sales Engineer
Education:
TEXAS TECH UNIVERSITY Lubbock, TX 2005 Bachelor of Arts in Political Science
Skills:
Proficient in Microsoft Office including Word, Excel, PowerPoint, Access, and Outlook; Industry specific engineering software, and organic-grown industry specific sales & inventory management systems