Russell A Fleming

US Patent:

8515568, Aug 20, 2013

Filed:

Sep 23, 2011

Appl. No.:

13/242816

Inventors:

Jeffery William Achtnig - Calgary, CA
Russell Fleming - Pleasanton CA, US
Jaideep Jain - San Jose CA, US

Assignee:

Novellus Systems, Inc. - Fremont CA

International Classification:

G05B 15/02
G05B 11/01
G05B 13/02
G06F 11/30
G06F 17/18
G06F 19/00
G01N 37/00

US Classification:

700108, 700 9, 700 19, 700 32, 700109, 700110, 700121, 702 84, 702181, 702182, 702183

Abstract:

Disclosed are apparatus and methods for monitoring an operation parameter of a process tool, independently of a process system recipe, are provided. In one embodiment, the behavior of a process device as it transitions between different states is monitored for a single cycle of operation or over time to detect trends that indicate a potential failure of the process device. When a trend that indicates a potential failure is detected, an alarm is generated. In one implementation, the time for reaching a particular stage of operation may be repeatedly monitored over a plurality of device cycles. For example, the time to open a valve or door may be monitored. In another example, the time for reaching a stable phase of gas flow after a ramping stage has commenced is monitored. When the time for reaching a particular stage begins to decline by a predetermined amount, an alarm may be generated.

US Patent:

8055370, Nov 8, 2011

Filed:

Jun 23, 2006

Appl. No.:

11/473890

Inventors:

Jeffery William Achtnig - Calgary, CA
Russell Fleming - Pleasanton CA, US
Jaideep Jain - San Jose CA, US

Assignee:

Novellus Systems, Inc. - San Jose CA

International Classification:

G04F 7/00
G05B 19/18
G05B 23/02
G06F 19/00

US Classification:

700108, 700 9, 700109, 700121, 340 31, 702176

Abstract:

Disclosed are apparatus and methods for monitoring an operation parameter of a process tool, independently of a process system recipe, are provided. In general, an indirect effect that results from implementing an event from a process system recipe on the process system is monitored without using the specific values or setpoints that are entered for such event into the process system to thereby change a state of such process system. In one embodiment, the behavior of a process device as it transitions between different states is monitored for a single cycle of operation or over time to detect trends that indicate a potential failure of the process device. When a trend that indicates a potential failure is detected, an alarm is generated. In one implementation, the time for reaching a particular stage of operation may be repeatedly monitored over a plurality of device cycles. For example, the time to open a valve or door may be monitored.