Russell A Kent

US Patent:

62160559, Apr 10, 2001

Filed:

Nov 9, 1998

Appl. No.:

9/188989

Inventors:

Subramanian Balamurugan - Singapore, SG
Chie-Keong Wong - Singapore, SG
Russell A. Kent - Richardson TX

Assignee:

Texas Instruments Incorporated - Dallas TX

International Classification:

G06F 1900
H01L 21301

US Classification:

700121

Abstract:

Partial wafer processing is achieved by down loading the wafer map of the whole wafer from a host (2) and if the partial wafer (half or quarter) contains the reference die (4) move table to a locator die (5) and upload locator die coordinates to wafer map data host (6) and remove other half or quadrants die coordinates from the map (10). If the partial wafer is not in the first half or first quadrant position wafertable to auxiliary reference die, find out which half or quadrant partial wafer belongs (8) and compute auxiliary reference die coordinates from locator die coordinates (9) and then using auxiliary die coordinates as information remove other quadrant or half die coordinates from the map (10).