Sam G Angelos

US Patent:

20040160143, Aug 19, 2004

Filed:

Feb 14, 2003

Appl. No.:

10/367156

Inventors:

Robert Shreeve - Corvallis OR, US
Eric Nikkel - Philomath OR, US
Michael Regan - Corvallis OR, US
Sam Angelos - Corvallis OR, US

International Classification:

H02N001/00

US Classification:

310/309000

Abstract:

A micro-mirror device includes a substrate, at least one electrode formed on the substrate, and a reflective element spaced from the substrate and extending beyond the at least one electrode. The reflective element is adapted to move between a first position and at least one second position, and, when the reflective element is in the at least one second position, a minimum distance between the reflective element and the at least one electrode is greater than a minimum distance between the reflective element and the substrate.