Sarang Gadre - Bear DE, US Shawn Bratt - Hockessin DE, US
Assignee:
American Air Liquide, Inc. - Fremont CA
International Classification:
B01D 59/16 F25J 3/00 C01B 21/04
US Classification:
62606, 62617, 96221
Abstract:
A mixture of air and one or more halogenated alkanes is directed to a gas separation membrane where it is separated into an oxygen, nitrogen, and moisture-enriched and halogenated alkane-depleted permeate and a halogenated alkane-enriched and oxygen, nitrogen, and moisture-depleted retentate. The retentate is directed to a cryogenic condenser where an amount of halogenated alkane is condensed therein.
Effluent Gas Recovery Process For Silicon Production
Sarang Gadre - Bear DE, US Shawn Bratt - Hockessin DE, US
International Classification:
B01D 53/22 B01D 50/00
US Classification:
95 55, 553851
Abstract:
Effluent gas from a polysilicon reactor is directed to a gas separation membrane with a permeate gas being recycled to the reactor and the retentate being chilled with a cryogenic condenser using liquid cryogen. Liquid cryogen vaporized by the hot effluent gas may be stored or used to seal and/or chill the reactor or blanket a Si feed to a SiHCl3 reactor.