Shobhit Te Verma

US Patent:

20140016125, Jan 16, 2014

Filed:

Feb 6, 2013

Appl. No.:

13/760829

Inventors:

Gary Janik - Palo Alto CA, US
Steve Cui - Fremont CA, US
Rex Runyon - , US
Dieter Wilk - San Jose CA, US
Steve Short - San Jose CA, US
Mikhail Haurylau - San Jose CA, US
Qiang Q. Zhang - San Jose CA, US
Grace Hsiu-Ling Chen - Los Gatos CA, US
Robert M. Danen - San Jose CA, US
Suwipin Martono - Castro Valley CA, US
Shobhit Verma - Fremont CA, US
Wenjian Cai - Sunnyvale CA, US
Meier Brender - San Jose CA, US

Assignee:

KLA-TENCOR CORPORATION - Milpitas CA

International Classification:

G01N 21/88
G02B 27/58

US Classification:

3562375, 359227

Abstract:

An inspection system with selectable apodization includes an illumination source configured to illuminate a surface of a sample, a detector configured to detect at least a portion of light emanating from the surface of the sample, the illumination source and the detector being optically coupled via an optical pathway of an optical system, a selectably configurable apodization device disposed along the optical pathway, wherein the apodization device includes one or more apodization elements operatively coupled to one or more actuation stages configured to selectably actuate the one or more apodization elements along one or more directions, and a control system communicatively coupled to the one or more actuation and configured to selectably control apodization of illumination transmitted along the optical pathway by controlling an actuation state of the one or more apodization elements.

US Patent:

20160054232, Feb 25, 2016

Filed:

Nov 2, 2015

Appl. No.:

14/930254

Inventors:

- Milpitas CA, US
Gary Janik - Palo Alto CA, US
Steve Cui - Fremont CA, US
Rex Runyon - , US
Dieter Wilk - San Jose CA, US
Steve Short - San Jose CA, US
Mikhail Haurylau - San Jose CA, US
Qiang Q. Zhang - San Jose CA, US
Grace Hsiu-Ling Chen - Los Gatos CA, US
Robert M. Danen - San Jose CA, US
Suwipin Martono - Castro Valley CA, US
Shobhit Verma - Fremont CA, US
Wenjian Cai - Sunnyvale CA, US
Meier Brender - San Jose CA, US

International Classification:

G01N 21/88
G01N 21/95

Abstract:

An inspection system with selectable apodization includes a selectably configurable apodization device disposed along an optical pathway of an optical system. The apodization device includes one or more apodization elements operatively coupled to one or more actuation stages. The one or more actuation stages are configured to selectably actuate the one or more apodization elements along one or more directions. The inspection system includes a control system communicatively coupled to the one or more actuation stages. The control system is configured to selectably control an actuation state of at the one or more apodization elements so as to apply a selected apodization profile formed with the one or more apodization elements.