Stephen R Michel

US Patent:

56161794, Apr 1, 1997

Filed:

Dec 21, 1993

Appl. No.:

8/170770

Inventors:

David A. Baldwin - Annandale VA
Stephen L. Michel - Alexandria VA

Assignee:

Commonwealth Scientific Corporation - Alexandria VA

International Classification:

C30B 2904

US Classification:

117108

Abstract:

A process for depositing amorphous or nanophase diamondlike carbon (DLC) and a-C:H carbon/hydrogen films with variable and controllable properties on the surface of a substrate is disclosed. The process utilizes a combined hydrocarbon ion beam and plasma-activated hydrocarbon gaseous radical flux produced by an end-Hall ion source to yield a film with good electron-emissivity characteristics or high hardness and good optical transparency, as desired. A second ion source providing a beam of argon ions above or together in nitrogen is optionally directed at the substrate for cleaning prior to deposition and for ion-assisted deposition during deposition or for doping.