Steve K Berger

US Patent:

6838668, Jan 4, 2005

Filed:

Oct 3, 2003

Appl. No.:

10/679100

Inventors:

Steve Berger - Portland OR, US
Lawrence Scipioni - Danvers MA, US

Assignee:

FEI Company - Hillsboro OR

International Classification:

G21K 700
G02N 2300

US Classification:

250306, 250310, 250423 F, 25044211

Abstract:

A system for obtaining an image of a cross-sectional surface of a workpiece includes a shaped beam ion projection column oriented along a first axis. The ion projection column projects an image of an aperture on the workpiece surface, thereby excavating a portion of the surface and exposing a cross-sectional surface. Because the ion beam is not focused on the surface, a low brightness ion source can be used. A focused particle beam column, typically a scanning electron microscope, is oriented along a second axis that intersects the first axis at a selected angle. This focused particle beam column generates a particle beam that is used to image the cross-sectional surface exposed by the ion projection column.