Search

Steve Selbrede

from Las Vegas, NV

Steve Selbrede Phones & Addresses

  • Las Vegas, NV
  • 1 Woodland Ct, Novato, CA 94947

Us Patents

  • Integrated Decoupling Capacitor Process

    view source
  • US Patent:
    20070026626, Feb 1, 2007
  • Filed:
    Jul 26, 2006
  • Appl. No.:
    11/494368
  • Inventors:
    Robert Ditizio - Petaluma CA, US
    Steve Selbrede - Novato CA, US
  • International Classification:
    H01L 21/20
  • US Classification:
    438396000
  • Abstract:
    The present invention discloses a fabrication process for integrated high dielectric constant capacitors for circuit decoupling. The top electrode is protected against the re-deposition of material from the bottom electrode during the patterning process of the bottom electrode, thus provides better capacitor yield against the shortage of top and bottom electrodes. The protection can be a sidewall spacer, or an extra hard mask protecting the sidewall of the top electrode. The dielectric for the decoupling capacitors is preferably novel high dielectric constant materials such as (BaCa)(TiZr)O(BCTZ). The used of novel BCTZ high dielectric constant materials requires compatible electrode or seed layer such as Au or NiV, plus a low power etching process to avoid material damage.
Name / Title
Company / Classification
Phones & Addresses
Steve Selbrede
CTO
University Mechanical & Engnr
Semiconductor and Related Device Manufacturing
2201 S Mcdowell Blvd Ext, Petaluma, CA 94954
(707)7635600

Resumes

Steve Selbrede Photo 1

Steve Selbrede

view source
Location:
11901 Alava Ave, Las Vegas, NV 89138

Facebook

Steve Selbrede Photo 2

Steve U Selbrede

view source

Get Report for Steve Selbrede from Las Vegas, NV
Control profile