Steven L Carson

US Patent:

6772612, Aug 10, 2004

Filed:

Jan 29, 2002

Appl. No.:

10/060864

Inventors:

Steven L. Carson - Portland OR

Assignee:

Intel Corporation - Santa Clara CA

International Classification:

B65D 5514

US Classification:

70 63, 312292, 70 82, 70158

Abstract:

An apparatus for holding a substrate includes a shelf capable of holding the substrate; a body which encloses the shelf, the body having an open side; and an outer door frame pivotally coupled to the body and defining an opening. The apparatus also includes an inner door which fits into the opening. The bodys open side is substantially covered by the inner door and by the outer door frame when the inner door and outer door frame are in closed positions. The apparatus can include a double hinge for pivotally coupling the outer door frame to the body. It can also include a bolt that is movably attached to the inner door, so that the inner door has a locked position in which the bolt extends into the frame and an unlocked position in which the bolt retracts from the frame.

US Patent:

7761179, Jul 20, 2010

Filed:

Sep 24, 2007

Appl. No.:

11/860515

Inventors:

Nital S. Patel - Mesa AZ, US
Steven L. Carson - Portland OR, US

Assignee:

Intel Corporation - Santa Clara CA

International Classification:

G06F 19/00

US Classification:

700103, 700104

Abstract:

Methods for consistent updates to APC models with partitioning along multiple components are generally described. In one example, a method includes acquiring measurement data from one or more semiconductor wafers of a processed first lot, the data having a plurality of contexts, applying a model having parameters with partitioning along the contexts to the measurement data; and applying a constraint on a subset of the model parameters such that the subset remains centered around zero to provide consistent updates for automated process control of lots processed after the first lot.

US Patent:

20080147228, Jun 19, 2008

Filed:

Dec 19, 2006

Appl. No.:

11/642577

Inventors:

Joel S. Fenner - Hillsboro OR, US
Brian S. Kinnear - Hillsboro OR, US
Steven L. Carson - Portland OR, US
Vincent A. Pagano - Chandler AZ, US

International Classification:

G06F 17/00

US Classification:

700121

Abstract:

In one embodiment, an apparatus and method for automated dynamic recipe generation and selection for semiconductor manufacturing are disclosed. In one embodiment, the method comprises: receiving a lot at a tool of a semiconductor manufacturing system; making, by a host controller for the tool, a lookup recipe call to an automated dynamic recipe generation and selection (ADRS) system; running, by the ADRS system, logic scripts to create a unique recipe instruction set for the particular tool and lot, the logic scripts to utilize at least one of results from past runs associated with the tool, historical statistical process control (SPC) system analysis results, and a context of the lookup recipe call in order to create the unique recipe instruction set; and returning the unique recipe instruction set to the host controller to be run by the tool on the lot.

US Patent:

D3131688, Dec 25, 1990

Filed:

May 12, 1986

Appl. No.:

6/862553

Inventors:

Gordon W. Pearlman - Portland OR
Steven Carson - Upper Saddle River NJ

Assignee:

Lightolier Incorporated - Jersey City NJ

US Classification:

D13169

US Patent:

D3151450, Mar 5, 1991

Filed:

May 12, 1986

Appl. No.:

6/862554

Inventors:

Gordon W. Pearlman - Portland OR
Steven Carson - Upper Saddle River NJ

Assignee:

Lightolier Incorporated - Jersey City NJ

US Classification:

D13169