Steven A Jenkins

US Patent:

20220308444, Sep 29, 2022

Filed:

Mar 23, 2021

Appl. No.:

17/210209

Inventors:

- Tokyo, JP
Steven T. JENKINS - Round Rock TX, US
Atsushi KUSAKA - Shimotsuke-shi, JP

International Classification:

G03F 7/00

Abstract:

A method and system for supplying control signals to two or more force actuators wherein each of the two or more force actuators having a defined force value. The method includes sending a first set of control signals to each of the actuators to ramp forces supplied to reach the defined force value at a same initial defined value time and sending a second set of control signals to each of the actuators to reduce the forces supplied starting at a same final defined value time to individual set point values, and wherein each of the two of more force actuators reach their individual set point values at a same set point time.

US Patent:

20220269166, Aug 25, 2022

Filed:

Feb 24, 2021

Appl. No.:

17/183895

Inventors:

- Tokyo, JP
Takahiro YOSHIDA - Austin TX, US
Steven T. JENKINS - Round Rock TX, US
Kenichi KOBAYASHI - Utsunomiya-shi, JP
Tatsuya ARAKAWA - Saitama-shi, JP

International Classification:

G03F 7/00

Abstract:

A method and system for imprinting a substrate supported on a moveable stage is provided and includes contacting a liquid resist on the substrate with a template and aligning the substrate with the template using a feedback-feedforward control process with a first set of control parameters. Calibration data is obtained and the viscosity of at least a portion of the resist is increased. The substrate is then with the template using the feedback-feedforward control process with a second set of control parameters after the viscosity of the resist has increased, the second set of control parameters are determined based on the calibration data and the resist is cured under the template.