Steven A Sherman

US Patent:

7799683, Sep 21, 2010

Filed:

Feb 6, 2007

Appl. No.:

11/671813

Inventors:

Arthur J. Learn - Cupertino CA, US
Steven R. Sherman - Newton MA, US
Robert Michael Geffken - Burlington VT, US
John J. Hautala - Beverly MA, US

Assignee:

Tel Epion, Inc. - Billerica MA

International Classification:

H01L 21/44

US Classification:

438687, 438618, 438629, 438659, 438658, 257E21476

Abstract:

Capping layer or layers on a surface of a copper interconnect wiring layer for use in interconnect structures for integrated circuits and methods and apparatus for forming improved integration interconnection structures for integrated circuits by the application of gas-cluster ion-beam processing. Reduced copper diffusion and improved electromigration lifetime result and the use of selective metal capping techniques and their attendant yield problems are avoided. Various cluster tool configurations including gas-cluster ion-beam processing modules for copper capping, cleaning, etching, and film formation steps are disclosed.

US Patent:

7838423, Nov 23, 2010

Filed:

Mar 27, 2009

Appl. No.:

12/412749

Inventors:

Arthur J. Learn - Cupertino CA, US
Steven R. Sherman - Newton MA, US
Robert Michael Geffken - Burlington VT, US
John J. Hautala - Beverly MA, US

Assignee:

TEL Epion Inc. - Billerica MA

International Classification:

H01L 21/44

US Classification:

438687, 438597, 438658, 438680, 438686, 438758, 257E21476, 257E21591

Abstract:

Methods of forming capping structures on one or more different material surfaces are provided. One embodiment includes disposing a semiconductor structure in a reduced pressure chamber, forming a capping GCIB within the reduced pressure chamber, and directing the capping GCIB onto at least one of the one or more different material surfaces, so as to form at least one capping structure on the one or more surfaces onto which the capping GCIB is directed.

US Patent:

20030098699, May 29, 2003

Filed:

Nov 16, 2001

Appl. No.:

09/990627

Inventors:

Mark Lemkin - El Cerrito CA, US
Jason Jones - Berkeley CA, US
Steven Sherman - Lexington MA, US
Thor Juneau - Berkeley CA, US
William Clark - Fremont CA, US

International Classification:

G01R027/26

US Classification:

324/678000

Abstract:

A capacitive sensing circuit coupled to a variable capacitor. The circuit comprises a sense pulse generator providing a first polarity sense pulse and a second polarity sense pulse; a sense capacitor coupled to the sense pulse generator; a charge detector coupled to the sense capacitor; and a storage device coupled to the charge detector. The storage device may be a sample and hold circuit, a capacitor or a buffer. Multiple capacitors may be provided to enable a position detection scheme which is suitable for use in an optical mirror switching array. An analog to digital converter may be coupled to the storage device and a digital demodulator device coupled to the output of the analog to digital converter.

US Patent:

6031625, Feb 29, 2000

Filed:

Jun 13, 1997

Appl. No.:

8/874974

Inventors:

Steven P. Sherman - Oakland CA
Chongshi Xu - Fremont CA
Torben Moller - Berkeley CA
Paul Feng - Hayward CA

Assignee:

Alysis Technologies, Inc. - Emeryville CA

International Classification:

G06K 1500

US Classification:

358 118

Abstract:

A system for retrieving reports and for extracting selected fields from print data streams that may be modified by a non-technical user to provide for revisions in format and additions of new report formats without any need for programming or knowledge of printer code. An extraction database is provided that contains report format information for each of the report formats in use. The report format information includes one or more extraction fields for each report format and a print position associated with the extraction field indicating the position at which the extraction field is printed in the corresponding report format. A print data stream containing a number of reports is analyzed for the presence of a first report, and the report format information associated with the first report format is retrieved from the extraction database. The print data stream is then searched for a data field to be printed at the print position associated with the extraction field in the retrieved report format information, and the content of the data field is extracted. The system is updated to search for new data fields or to add revised report formats simply by updating the extraction database, which may be performed by a business user through a graphical user interface or menu system at a display terminal.