Susan Greenberg Gordon

US Patent:

20030157271, Aug 21, 2003

Filed:

Mar 20, 2003

Appl. No.:

10/391785

Inventors:

Michael Duignan - Washington DC, US
Susan Gordon - Washington DC, US
C. Christensen - Fairhaven MD, US

International Classification:

C23C014/30

US Classification:

427/596000

Abstract:

Pulse-position synchronized deposition of a material in miniature structure manufacturing processes is carried out in a fabrication tool including a material carrier element, a source of energy generating pulses of energy, a substrate, and a control unit operatively coupled to the source of energy, substrate, and the material carrier element. The control unit exposes a first area of the material carrier element to a first pulse of energy, pauses the exposure while initiating relative motion between the source of energy and the substrate at a predetermined first speed and relative motion between the material carrier element and the energy source at a predetermined second speed which is a function of the first speed, and slowing (or stopping) relative motion between the energy source, material carrier element, and the substrate, while exposing the unablated area of the material carrier element adjacent to previously ablated area to a second pulse of energy.