Thomas Neal Bailey

US Patent:

20090074987, Mar 19, 2009

Filed:

Jan 7, 2008

Appl. No.:

11/970495

Inventors:

Raymond Auyeung - Alexandria VA, US
Alberto Pique - Crofton MD, US
Thomas H. Bailey - San Jose CA, US
Lydia J. Young - Palo Alto CA, US

Assignee:

Photon Dynamics, Inc. - San Jose CA
The United States of America as represented by the Secretary of Navy - Arlington VA

International Classification:

C23C 16/44

US Classification:

427596

Abstract:

A laser decal transfer is used to generate thin film features by directing laser pulses of very low energy at the back of a target substrate illuminating an area of a thin layer of a high viscosity rheological fluid coating the front surface of the target. The illuminated area is shaped and defined by an aperture centered about the laser beam. The decal transfer process allows for the release and transfer from the target substrate to the receiving substrate a uniform and continuous layer identical in shape and size of the laser irradiated area. The released layer is transferred across the gap with almost no changes to its initial size and shape. The resulting patterns transferred onto the receiving substrate are highly uniform in thickness and morphology, have sharp edge features and exhibit high adhesion, independent of the surface energy, wetting or phobicity of the receiving substrate.