Thomas D Swain

US Patent:

53846621, Jan 24, 1995

Filed:

Jul 12, 1993

Appl. No.:

8/090585

Inventors:

Nord C. Andresen - Hayward CA
Richard S. DiGennaro - Albany CA
Thomas L. Swain - Richmond CA

Assignee:

The Regents of the University of California - Berkeley CA

International Classification:

G01J 304

US Classification:

359894

Abstract:

This invention relates generally to slits used in optics that must be precisely aligned and adjusted. The optical slits of the present invention are useful in x-ray optics, x-ray beam lines, optical systems in which the entrance slit is critical for high wavelength resolution. The invention is particularly useful in ultra high vacuum systems where lubricants are difficult to use and designs which avoid the movement of metal parts against one another are important, such as monochrometers for high wavelength resolution with ultra high vacuum systems. The invention further relates to optical systems in which temperature characteristics of the slit materials is important. The present invention yet additionally relates to precision slits wherein the opposing edges of the slit must be precisely moved relative to a center line between the edges with each edge retaining its parallel orientation with respect to the other edge and/or the center line.

US Patent:

20190378734, Dec 12, 2019

Filed:

May 24, 2019

Appl. No.:

16/421746

Inventors:

- Haag, CH
Martin NETZER - Bludenz, AT
Andreas HOFER - Widnau, CH
Eligio BELLERI - Balzers, LI
Marco APOLLONI - Marbach, CH
Thomas L. SWAIN - Walnut Creek CA, US

International Classification:

H01L 21/67
H01L 21/677
H01L 21/673
H04B 5/00
G06N 20/00

Abstract:

A wafer transfer unit includes at least one data processing unit, which is configured at least for a registration and/or processing of sensor data of at least one sensor, allocated to at least one sub-component of a wafer transfer system, of a sensor module, in particular includes at least one wafer processing module of the wafer transfer system, includes at least one wafer interface system of the wafer transfer system with a wafer transport container and a loading and/or unloading station for a loading and/or unloading of the wafer transport container and/or of the wafer processing module, includes at least one wafer transport container transport system of the wafer transfer system and/or includes at least one wafer handling robot of the wafer transfer system.