Timothy Nathan Jackson

US Patent:

6563300, May 13, 2003

Filed:

Apr 11, 2001

Appl. No.:

09/832781

Inventors:

Timothy L. Jackson - Pflugerville TX
Richard J. Markle - Austin TX
Edward C. Stewart - Buda TX

Assignee:

Advanced Micro Devices, Inc. - Austin TX

International Classification:

G01R 3100

US Classification:

3241581, 324765, 700121, 7071041, 36446817

Abstract:

A method for detecting faults in a manufacturing line includes processing a plurality of workpieces in a plurality of tools; generating a first error signal associated with the workpieces based on the processing performed in a first tool of the plurality of tools; generating a second error signal associated with the workpieces based on the processing performed in a second tool of the plurality of tools; combining the first and second error signals to generate a composite error signal; and identifying a fault condition with the workpieces based on the composite error signal. A manufacturing system includes a plurality of tools adapted to process workpieces, and a fault monitor. The fault monitor is adapted to receive a first error signal associated with the workpieces based on the processing performed in a first tool of the plurality of tools, receive a second error signal associated with the workpieces based on the processing performed in a second tool of the plurality of tools, combine the first and second error signals to generate a composite error signal, and identify a fault condition with the workpieces based on the composite error signal.

US Patent:

6925347, Aug 2, 2005

Filed:

Aug 19, 2002

Appl. No.:

10/223174

Inventors:

Michael L. Miller - Cedar Park TX, US
Thomas J. Sonderman - Austin TX, US
Alexander J. Pasadyn - Austin TX, US
Richard J. Markle - Austin TX, US
Brian K. Cusson - Austin TX, US
Patrick M. Cowan - Pflugerville TX, US
Timothy L. Jackson - Pflugerville TX, US
Naomi M. Jenkins - Round Rock TX, US

Assignee:

Advanced Micro Devices, Inc. - Austin TX

International Classification:

G06F019/00

US Classification:

700121, 438 14, 700 31, 700 44, 700 57, 702174, 716 21

Abstract:

A method and apparatus is provided for a process control based on an estimated process result. The method comprises processing a workpiece using a processing tool, receiving trace data associated with the processing of the workpiece from the processing tool and estimating at least one process result of the workpiece based on at least a portion of the received trace data. The method further comprises adjusting processing of a next workpiece based on the estimated at least one process result.

US Patent:

6985825, Jan 10, 2006

Filed:

Jul 15, 2003

Appl. No.:

10/619843

Inventors:

Richard P. Good - Austin TX, US
Timothy L. Jackson - Pflugerville TX, US
Brian K. Cusson - Austin TX, US

Assignee:

Advanced Micro Devices, Inc. - Austin TX

International Classification:

G06F 19/00
G01N 37/00

US Classification:

702 83, 700108

Abstract:

A method includes processing a plurality of workpieces to form at least one feature on each workpiece. A plurality of characteristics of the feature is measured. A covariance matrix including diagonal and non-diagonal terms for the plurality of characteristics measured is constructed. At least the non-diagonal terms of the covariance matrix are monitored. A sampling plan for measuring the workpieces is determined based on the monitoring. A system includes a plurality of tools, at least one metrology tool, and a sampling controller. The tools are configured to process a plurality of workpieces to form at least one feature on each workpiece. The metrology tool is configured to measure a plurality of characteristics of the feature. The sampling controller is configured to construct a covariance matrix including diagonal and non-diagonal terms for the plurality of characteristics measured, monitor at least the non-diagonal terms of the covariance matrix, and determine a sampling plan for measuring the workpieces based on the monitoring.

US Patent:

6988225, Jan 17, 2006

Filed:

Oct 31, 2002

Appl. No.:

10/285003

Inventors:

Matthew A. Purdy - Austin TX, US
Richard J. Markle - Austin TX, US
Timothy L. Jackson - Pflugerville TX, US

Assignee:

Advanced Micro Devices, Inc. - Austin TX

International Classification:

G06F 11/00

US Classification:

714 49, 700108

Abstract:

A method and an apparatus are provided for verifying a fault detection result in a system. The apparatus includes an interface and a control unit. The interface is adapted to receive data associated with a process operation and adapted to receive information provided by a process controller associated with the process operation. The control unit, which is communicatively coupled to the interface, is adapted to perform a fault detection analysis based on the data associated with the process operation and verify a result of the fault detection analysis based on the information provided by the process controller.

US Patent:

20050021272, Jan 27, 2005

Filed:

Jul 7, 2003

Appl. No.:

10/614604

Inventors:

Naomi Jenkins - Round Rock TX, US
Timothy Jackson - Pflugerville TX, US
Howard Castle - Austin TX, US
Brian Cusson - Austin TX, US

International Classification:

G06F019/00

US Classification:

702105000

Abstract:

A method and an apparatus for dynamically adjusting a metrology routing of a batch of workpieces. The method comprises performing a process step upon a batch of workpieces using a processing tool, performing a tool state analysis upon the processing tool, and performing a dynamic metrology routing adjustment process based upon the tool state analysis. The dynamic metrology routing adjustment process further comprises correlating the tool state analysis to the batch of workpieces and adjusting a metrology routing based upon the correlation.