Timothy A Vaughn

US Patent:

6583427, Jun 24, 2003

Filed:

Aug 31, 2000

Appl. No.:

09/652440

Inventors:

Walter J. Edmonds - Allen TX
Timothy B. Vaughn - Lubbock TX

Assignee:

Texas Instruments Incorporated - Dallas TX

International Classification:

H01J 2700

US Classification:

25049221, 250426, 250423 R

Abstract:

A liner ( ) for an arc chamber ( ) of an ion implanter. The arc chamber ( ) comprises a liner ( ) on the inner surface ( ) of the arc chamber ( ) that extends the life of the arc chamber ( ). The liner ( ) comprises a one piece portion ( ) that covers the bottom and long sidewalls of the arc chamber ( ) and two end plates ( ) for covering the end walls of the arc chamber ( ). When the liner ( ) wears out it is replaced at a significantly reduced cost compared to replacing the entire arc chamber ( ).