Tony James Zemlock

US Patent:

20110005601, Jan 13, 2011

Filed:

Dec 17, 2008

Appl. No.:

12/810756

Inventors:

Iqbal Shareef - Fremont CA, US
Mark Taskar - San Mateo CA, US
Tony Zemlock - Tracy CA, US

Assignee:

LAM RESEARCH CORPORATION - Fremont CA

International Classification:

F15D 1/00

US Classification:

137 1, 137861

Abstract:

In one embodiment, an apparatus for providing a gas mixture of a plurality of gases, may have a plurality of mass flow controllers (MFCs), a mixing manifold in fluid connection with each plurality of MFCs, a plurality of mixing manifold exits positioned on the mixing manifold; and an isolation device in fluid connection with each of the plurality of mixing manifold exits.

US Patent:

20170032982, Feb 2, 2017

Filed:

Nov 19, 2015

Appl. No.:

14/945680

Inventors:

- Fremont CA, US
Yoshie Kimura - Castro Valley CA, US
James Adams - Union City CA, US
Yoko Yamaguchi Adams - Union City CA, US
Tony Zemlock - Tracy CA, US

International Classification:

H01L 21/67
F16L 55/07
F16L 41/02

Abstract:

A gas delivery system for a substrate processing system includes a first manifold and a second manifold. A gas delivery sub-system selectively delivers gases from gas sources. The gas delivery sub-system delivers a first gas mixture to the first manifold and a second gas mixture. A gas splitter includes an inlet in fluid communication with an outlet of the second manifold, a first outlet in fluid communication with an outlet of the first manifold, and a second outlet. The gas splitter splits the second gas mixture into a first portion at a first flow rate that is output to the first outlet and a second portion at a second flow rate that is output to the second outlet. First and second zones of the substrate processing system are in fluid communication with the first and second outlets of the gas splitter, respectively.