Vincent Dimilia

US Patent:

51557495, Oct 13, 1992

Filed:

Mar 28, 1991

Appl. No.:

7/676501

Inventors:

Vincent DiMilia - Carmel NY
John M. Warlaumont - Chappaqua NY

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

G21K 500

US Classification:

378 35

Abstract:

An X-ray mask structure for X-ray lithography which can be adjusted by applied force to provide variable magnification of a pattern on the mask membrane. The applied force is provided by the heat expansion of a deformable member and the resultant stress on a support ring. A circular patterned mask membrane is supported in a ring composed, for example, of silicon or silicon-pyrex. The support ring contains a concentric aluminum ring having an embedded circular heating element. The heating element causes expansion of the aluminum ring which causes mechanical stress in the support and expansion of the mask membrane. Expansion of the mask membrane results in a corresponding magnification of the pattern thereon.

US Patent:

20170242345, Aug 24, 2017

Filed:

Jul 9, 2015

Appl. No.:

15/504749

Inventors:

- Veldhoven, NL
Vincent DIMILIA - Pleasantville NY, US
Ronald Peter TOTILLO - Brookfield CT, US
Tammo UITTERDIJK - Wilton CT, US
Steven Michael ZIMMERMAN - Beacon NY, US

Assignee:

ASML Holding N.V. - Veldhoven

International Classification:

G03F 7/20
H01L 21/67
H01L 21/683

Abstract:

An electrostatic clamp () and a method for manufacturing the same is disclosed. The electrostatic clamp includes a first layer () having a first ultra-low expansion (ULE) material, a second layer () coupled to the first layer, having a second ULE material, and a third layer (), coupled to the second layer, having a third ULE material. The electrostatic clamp further includes a plurality of fluid channels () located between the first layer and the second layer and a composite layer () interposed between the second layer and the third layer. The method for manufacturing the electrostatic clamp includes forming the plurality of fluid channels, disposing the composite layer on the third layer, and coupling the third layer to the second layer. The plurality of fluid channels is configured to carry a thermally conditioned fluid for temperature regulation of a clamped object.