Commercial and Residential Real Estate Probate Estate Planning Collections Foreclosures Bankruptcy Personal Injury Commercial Litigation Commercial General Practice
Robert C. Bausmith - Glastonbury CT William J. Cote - Essex Junction VT John E. Cronin - Milton VT Karey L. Holland - Essex VT Carter W. Kaanta - Colchester VT Terrance M. Wright - Williston VT
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
C23F 100 H01L 23306
US Classification:
156643
Abstract:
A method for dry etching metals that form low volatility chlordes, in which Z-Cl reaction products are controllably introduced into a conventional Cl-based plasma independent of the workpiece. The Z-Cl products (e. g. , AlCl. sub. 3, GaCl. sub. 3, etc. ) are metal chlorides that have both electron acceptor and chloride donor properties. Thus, metals M (e. g. , cobalt, copper and nickel) that usually produce low volatility chlorides can be controllably complexed to form high volatility Z. sub. x Cl. sub. y M. sub. z reaction products.
Isbn (Books And Publications)
Covering Violence: A Guide to Ethical Reporting About Victims and Trauma
Wilson Elementary School Manchester NH 1982-1986, Jewett Elementary School Manchester NH 1986-1989, Southside Junior High School Manchester NH 1989-1991
Community:
Rachel Pepin, Carol Blanchette, Laura Foote, Claire Goldstein, Bert Pinard