Xiaowei Li

US Patent:

7976634, Jul 12, 2011

Filed:

Nov 8, 2007

Appl. No.:

11/937388

Inventors:

David Keith Carlson - San Jose CA, US
Satheesh Kuppurao - San Jose CA, US
Howard Beckford - San Jose CA, US
Herman Diniz - Fremont CA, US
Kailash Kiran Patalay - Santa Clara CA, US
Brian Hayes Burrows - San Jose CA, US
Jeffrey Ronald Campbell - San Francisco CA, US
Xiaowei Li - Austin TX, US
Errol Antonio Sanchez - Tracy CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

C23C 16/452
C23C 16/46
C23C 16/02
C23F 1/00
H01L 21/306
C23C 16/06

US Classification:

118724, 1563451

Abstract:

A method and apparatus for delivering precursor materials to a processing chamber is described. The apparatus includes a gas distribution assembly having multiple gas delivery zones. Each zone may include a plenum having an inlet for receiving a precursor gas and at least one source of non-thermal energy, such as an infrared light source. The at least one source of non-thermal energy is may be varied to control the intensity of wavelengths from the infrared light source.

US Patent:

20170362702, Dec 21, 2017

Filed:

Mar 3, 2014

Appl. No.:

14/195423

Inventors:

- Santa Clara CA, US
Satheesh KUPPURAO - San Jose CA, US
Howard BECKFORD - Santa Clara CA, US
Herman DINIZ - Fremont CA, US
Kailash Kiran PATALAY - Santa Clara CA, US
Brian Hayes BURROWS - San Jose CA, US
Jeffery Ronald CAMPBELL - Mountain View CA, US
Zuoming ZHU - Sunnyvale CA, US
Xiaowei LI - Austin TX, US
Errol Antonio SANCHEZ - Tracy CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

C23C 16/455
C23C 16/22
C23C 16/452
H01L 21/02

Abstract:

In one embodiment, a gas distribution assembly includes an injection block having at least one inlet to deliver a precursor gas to a plurality of plenums from at least two gas sources, a perforated plate bounding at least one side of each of the plurality of plenums, at least one radiant energy source positioned within each of the plurality of plenums to provide energy to the precursor gas from one or both of the at least two gas sources and flow an energized gas though openings in the perforated plate and into a chamber, and a variable power source coupled to each of the radiant energy sources positioned within each of the plurality of plenums.