Xing L Chen

US Patent:

20220307126, Sep 29, 2022

Filed:

Jun 13, 2022

Appl. No.:

17/838805

Inventors:

- Santa Clara CA, US
Xing CHEN - Dublin CA, US
Keith A. MILLER - Mountain View CA, US
Jothilingam RAMALINGAM - Milpitas CA, US
Jianxin LEI - Fremont CA, US

International Classification:

C23C 14/34
H01J 37/32

Abstract:

Methods and apparatus for passivating a target are provided herein. For example, a method includes a) supplying an oxidizing gas into an inner volume of the process chamber; b) igniting the oxidizing gas to form a plasma and oxidize at least one of a target or target material deposited on a process kit disposed in the inner volume of the process chamber; and c) performing a cycle purge comprising: c1) providing air into the process chamber to react with the at least one of the target or target material deposited on the process kit; c2) maintaining a predetermined pressure for a predetermined time within the process chamber to generate a toxic by-product caused by the air reacting with the at least one of the target or target material deposited on the process kit; and c3) exhausting the process chamber to remove the toxic by-product.

US Patent:

20210317568, Oct 14, 2021

Filed:

Apr 13, 2020

Appl. No.:

16/846505

Inventors:

- Santa Clara CA, US
Xing CHEN - Dublin CA, US
Keith A. MILLER - Mountain View CA, US
Jothilingam RAMALINGAM - Milpitas CA, US
Jianxin LEI - Fremont CA, US

International Classification:

C23C 14/34
H01J 37/32

Abstract:

Methods and apparatus for passivating a target are provided herein. For example, a method includes a) supplying an oxidizing gas into an inner volume of the process chamber; b) igniting the oxidizing gas to form a plasma and oxidize at least one of a target or target material deposited on a process kit disposed in the inner volume of the process chamber; and c) performing a cycle purge comprising: c1) providing air into the process chamber to react with the at least one of the target or target material deposited on the process kit; c2) maintaining a predetermined pressure for a predetermined time within the process chamber to generate a toxic by-product caused by the air reacting with the at least one of the target or target material deposited on the process kit; and c3) exhausting the process chamber to remove the toxic by-product.