Yang Zhang

US Patent:

7371467, May 13, 2008

Filed:

Apr 13, 2004

Appl. No.:

10/824123

Inventors:

Nianci Han - San Jose CA, US
Li Xu - San Jose CA, US
Hong Shih - Walnut CA, US
Yang Zhang - Albany CA, US
Danny Lu - Milpitas CA, US
Jennifer Y. Sun - Sunnyvale CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

B32B 15/04
B32B 15/20
B01J 19/02
B05C 11/00
G03F 7/16

US Classification:

428632, 428633, 428660, 422241, 118506, 118715

Abstract:

A component capable of being exposed to a plasma in a process chamber has a structure having an electroplated coating comprising yttrium-containing species. The electroplated coating is resistant to corrosion in the plasma, and can have a compositional gradient of yttrium-containing species through a thickness of the coating. In one embodiment, the coating is formed by electroplating a layer comprising yttrium onto the surface, and then electroplating a second layer onto the first layer, and annealing the first and second layers. The second layer can comprise aluminum or zirconium. In another embodiment, the coating is formed by electroplating a layer comprising a mixture of aluminum and yttrium onto the surface and annealing the layer.

US Patent:

7389744, Jun 24, 2008

Filed:

Mar 29, 2006

Appl. No.:

11/308488

Inventors:

Jingxi Zhang - Foster City CA, US
Yang Zhang - Foster City CA, US
Huifang Ni - Foster City CA, US

International Classification:

A01K 1/03

US Classification:

119421

Abstract:

A system for tracking the laboratory animal position and movement in a walled enclosure or cage for observation and evaluation is disclosed. The system consists of a plate placed on the bottom of the cage whereon multiple electrodes are configured as column-row two-dimensional electrode array, an electronic circuit detecting and measuring the capacitance between said electrodes, and a microprocessor determining the animal's location. The electronic circuit repeatedly measures the capacitance between the electrodes in a sequential manner. The animal's location and movement is determined by detecting the changes in capacitance on said plate.

US Patent:

7833401, Nov 16, 2010

Filed:

Jun 21, 2007

Appl. No.:

11/766723

Inventors:

Nianci Han - San Jose CA, US
Li Xu - San Jose CA, US
Hong Shih - Walnut CA, US
Yang Zhang - Albany CA, US
Danny Lu - Milpitas CA, US
Jennifer Y. Sun - Sunnyvale CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

C25D 5/10
C25D 5/50
C25D 3/54

US Classification:

205170, 205192, 205224, 205227, 205228, 205261

Abstract:

A method of forming a component capable of being exposed to a plasma in a process chamber comprises forming a structure comprising a surface and electroplating yttrium, and optionally aluminum or zirconium, onto the surface. Thereafter, the electroplated layer can be annealed to oxide the yttrium and other electroplated species.

US Patent:

8114525, Feb 14, 2012

Filed:

May 8, 2008

Appl. No.:

12/151842

Inventors:

Nianci Han - San Jose CA, US
Li Xu - San Jose CA, US
Hong Shih - Walnut CA, US
Yang Zhang - Albany CA, US
Danny Lu - Milpitas CA, US
Jennifer Y. Sun - Sunnyvale CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

B32B 15/04
B32B 15/20
B01J 19/02
B05C 11/00

US Classification:

428610, 428632, 428650, 428656, 428660, 422241, 422129, 118726, 118728, 118504

Abstract:

A component capable of being exposed to a plasma in a process chamber has a structure having an electroplated coating comprising yttrium-containing species. The electroplated coating can include zirconium oxide, or can have an oxide layer thereon. In another embodiment the electroplated coating comprises a first species and is coated with a second electroplated coating comprising a second species that is different from the first species. The electroplated coating is resistant to corrosion in the plasma. In another embodiment, the electroplated coating has an interface having a thickness with a first concentration gradient of an yttrium-containing species and a second concentration gradient of a second species. An electroplated coating having a layer comprising first and second concentration gradients of first and second metals can be formed by varying the concentration of the first and second metal electrolyte species in the electroplating bath to electroplate the coating.

US Patent:

8618914, Dec 31, 2013

Filed:

Jan 4, 2011

Appl. No.:

12/984451

Inventors:

Mark Bachman - Irvine CA, US
Yang Zhang - Irvine CA, US
Scott McLaughlin - Irvine CA, US

Assignee:

The Regents of the University of California - Oakland CA

International Classification:

H04Q 5/22
G08B 17/00
G08B 21/00
H01C 7/00
G08B 13/14

US Classification:

340 101, 340584, 340589, 340540, 3405721, 3405722, 3405723, 3405724, 3405725, 3405726, 3405727, 3405728, 3405729, 338 13

Abstract:

An apparatus provides environmental monitoring of an item and includes an RFID tag, and a passive switch for sensing an environmental parameter to which the item is subjected, and coupled to the RFID tag so that a measurement of the sensed environmental parameter can be stored, the RFID tag for providing remote readout of the sensed environmental parameter. A method provides environmental monitoring of an item and includes the steps of sensing an environmental parameter to which the item is subjected with activation of a passive switch, storing a measurement of the sensed environmental parameter upon the event of activation of the passive switch, and providing remote readout of the measurement of the sensed environmental parameter with an RFID tag.

US Patent:

20040095317, May 20, 2004

Filed:

Nov 20, 2002

Appl. No.:

10/065798

Inventors:

Jingxi Zhang - Foster City CA, US
Yang Zhang - Foster City CA, US
Huifang Ni - Foster City CA, US

International Classification:

G09G005/08

US Classification:

345/158000

Abstract:

A universal television and computer pointing control system is disclosed. The system is comprised of a handheld pointing device, a display control unit, and a command delivery unit. The system allows the user to simply point and click to control a computer or various home entertainment component devices remotely. Inside the handheld device, orientation sensors detect pointing direction. The pointing direction signals are transmitted to the display control unit, and a cursor (pointer) is drawn onto the screen indicating the pointer's location. By interpreting the pointing direction signals and the button activities, the display control unit issues a control signal to the command delivery unit. The command delivery unit then forwards the commands to the target device to execute the desired control function.

US Patent:

20120103768, May 3, 2012

Filed:

Oct 31, 2011

Appl. No.:

13/286120

Inventors:

Mark Bachman - Irvine CA, US
Yang Zhang - Irvine CA, US
Minfeng Wang - Irvine CA, US
Sung Jun Kim - Irvine CA, US

International Classification:

H01H 59/00
H05K 13/00

US Classification:

200181, 295921

Abstract:

Magnetically actuated micro-electro-mechanical capacitor switches in laminate are disclosed. According to one embodiment, an apparatus comprises a first layer comprising a coil and magnetic element, the magnetic element made from one of nickel and iron; a second layer comprising a flexible member, wherein a permanent magnet is attached to the flexible member; a conductive plate having an insulating dielectric coating, the conductive plate attached to one of the flexible member or a magnet; and a third layer comprising a transmission line and magnetic material, wherein the transmission line comprises one or more of a signal conductor and one or more ground conductors in near proximity.

US Patent:

20120138472, Jun 7, 2012

Filed:

Feb 13, 2012

Appl. No.:

13/372435

Inventors:

Nianci HAN - San Jose CA, US
Li Xu - San Jose CA, US
Hong Shih - Walnut CA, US
Yang Zhang - Albany CA, US
Danny Lu - Milpitas CA, US
Jennifer Y. Sun - Sunnyvale CA, US

International Classification:

C25D 5/10
C25D 5/50

US Classification:

205170

Abstract:

Methods of fabricating a chamber component capable of being exposed to a plasma in a process chamber includes: providing a component structure composed of metal; immersing the surface of the component structure in an electroplating bath comprising first metal electrolyte species and second metal electrolyte species; forming a cathode by connecting the component structure to a negative terminal of a voltage source; immersing in the electroplating bath, an anode comprising an inert material or material to be electroplated, and connecting the anode to a positive terminal of the voltage source; and electroplating a layer having a concentration gradient of the first metal, second metal, or both.