Won Bang - Santa Clara CA, US Yen Kun Wang - Fremont CA, US Yeh Jen Kao - San Jose CA, US
Assignee:
Applied Materials Inc. - Santa Clara CA
International Classification:
C23C 16/00 C23F 1/00 H01L 21/306
US Classification:
118715, 118726, 118724, 15634537
Abstract:
Apparatus and method for delivering processing gas are provided. The apparatus for delivering processing gas from a vaporizer to a processing system comprises: a valve connected between the vaporizer and the processing system, the valve having a valve input connected to a vaporizer output and a first valve output connected to a processing system input and a second valve output connected to a bypass line; and a controller for switching the valve between the first valve output and the second valve output. The apparatus may further comprise: a second valve connected between a carrier gas source, a divert gas source and the vaporizer, the second valve having a first valve input connected to the carrier gas source, a second valve input connected to the divert gas source, and a valve output connected to a vaporizer input.