Yu U Yang

US Patent:

7977249, Jul 12, 2011

Filed:

Mar 7, 2008

Appl. No.:

12/074912

Inventors:

Xinye Liu - Sunnyvale CA, US
Yu Yang - Santa Clara CA, US
Chiukin Steven Lai - Sunnyvale CA, US

Assignee:

Novellus Systems, Inc. - San Jose CA

International Classification:

H01L 21/302
H01L 21/461

US Classification:

438724, 216 79

Abstract:

Methods for removing silicon nitride and elemental silicon during contact preclean process involve converting these materials to materials that are more readily etched by fluoride-based etching methods, and subsequently removing the converted materials by a fluoride-based etch. Specifically, silicon nitride and elemental silicon may be treated with an oxidizing agent, e. g. , with an oxygen-containing gas in a plasma, or with Oor Oin the absence of plasma to produce a material that is more rich in Si—O bonds and is more easily etched with a fluoride-based etch. Alternatively, silicon nitride or elemental silicon may be doped with a number of doping elements, e. g. , hydrogen, to form materials which are more easily etched by fluoride based etches. The methods are particularly useful for pre-cleaning contact vias residing in a layer of silicon oxide based material because they minimize the unwanted increase of critical dimension of contact vias.

US Patent:

8097877, Jan 17, 2012

Filed:

Dec 20, 2006

Appl. No.:

11/642217

Inventors:

Tobin J. Marks - Evanston IL, US
Antonio Facchetti - Chicago IL, US
Lian Wang - Evanston IL, US
Myung-Han Yoon - Cambridge MA, US
Yu Yang - Santa Clara CA, US

Assignee:

Northwestern University - Evanston IL

International Classification:

H01L 29/10
H01L 29/12

US Classification:

257 43, 257E21464, 438101, 438109

Abstract:

Inorganic semiconducting compounds, composites and compositions thereof, and related device structures.

US Patent:

8138364, Mar 20, 2012

Filed:

Mar 22, 2007

Appl. No.:

11/726624

Inventors:

Tobin J. Marks - Evanston IL, US
Jun Ni - Quincy MA, US
Anchuan Wang - San Jose CA, US
Yu Yang - Santa Clara CA, US
Andrew Metz - Beaverton OR, US
Shu Jin - Shanghai, CN
Lian Wang - Lowell MA, US

Assignee:

Northwestern University - Evanston IL

International Classification:

C07F 3/06

US Classification:

556130

Abstract:

Transparent conducting oxide thin films having a reduced indium content and/or an increased tin content are provided. In addition, processes for producing the same, precursors for producing the same, and transparent electroconductive substrate for display panels and organic electroluminescence devices, both including the transparent conducting oxide thin films, are provided.

US Patent:

8395150, Mar 12, 2013

Filed:

Jan 16, 2012

Appl. No.:

13/351050

Inventors:

Tobin J. Marks - Evanston IL, US
Antonio Facchetti - Chicago IL, US
Lian Wang - Evanston IL, US
Myung-Han Yoon - Cambridge MA, US
Yu Yang - Santa Clara CA, US

Assignee:

Northwestern University - Evanston IL

International Classification:

H01L 29/10
H01L 29/12

US Classification:

257 43, 257E21464, 438101, 438109

Abstract:

Inorganic semiconducting compounds, composites and compositions thereof, and related device structures.

US Patent:

8445309, May 21, 2013

Filed:

Aug 22, 2011

Appl. No.:

13/214831

Inventors:

Benyamin Buller - Perrysburg OH, US
Markus Gloeckler - Perrysburg OH, US
Yu Yang - Perrysburg OH, US

Assignee:

First Solar, Inc. - Perrysburg OH

International Classification:

H01L 21/306

US Classification:

438 71, 15634554

Abstract:

A method of forming an anti-reflective surface for photovoltaic modules. A photovoltaic module including a surface configured to be illuminated is provided. The surface is contacted with an etchant, thereby modifying a portion of the surface to alter the index of refraction.

US Patent:

20090243668, Oct 1, 2009

Filed:

Mar 28, 2008

Appl. No.:

12/058590

Inventors:

Guangbin Zhang - Sunnyvale CA, US
Wei Deng - Sunnyvale CA, US
Yu Shen Yang - San Jose CA, US

Assignee:

OMNIVISION TECHNOLOGIES, INC. - Sunnyvale CA

International Classification:

H03B 19/00

US Classification:

327117, 327115

Abstract:

Embodiments of the present invention synthesize a core frequency divider by adding a switching feedback shell and using multiple clock edges to trigger the frequency divider. Feedback logic is used to determine which edge will be used. Embodiments allow multiple recursive use, which boosts the overall speed resulting frequency divider circuit 2times faster than the core frequency divider.

US Patent:

20100186815, Jul 29, 2010

Filed:

Jan 14, 2010

Appl. No.:

12/687697

Inventors:

Yu Yang - Perrysburg OH, US
Boil Pashmakov - Troy MI, US
Zhibo Zhao - Novi MI, US

Assignee:

First Solar, Inc. - Perrysburg OH

International Classification:

H01L 31/0224
H01L 31/18
H01L 31/0296

US Classification:

136256, 438 84, 257E31126, 257E31015

Abstract:

A photovoltaic device can include a semiconductor absorber layer with improved cadmium telluride orientation.

US Patent:

20100288354, Nov 18, 2010

Filed:

May 18, 2010

Appl. No.:

12/782527

Inventors:

Scott Mills - Perrysburg OH, US
Dale Roberts - Temperance MI, US
Zhibo Zhao - Novi MI, US
Yu Yang - Perrysburg OH, US

Assignee:

First Solar, Inc. - Perrysburg OH

International Classification:

H01L 31/0224
H01L 31/18
H01L 29/43
H01L 21/283

US Classification:

136256, 438 98, 257750, 438609, 257E31126, 257E29139, 257E21159

Abstract:

A photovoltaic device can include a transparent conductive oxide layer adjacent to a substrate and one or more barrier layers, which can include a silicon oxide or a silicon nitride.