Badri N Krishnamurthy

US Patent:

7069101, Jun 27, 2006

Filed:

Jul 29, 1999

Appl. No.:

09/363966

Inventors:

John F. Arackaparambil - San Carlos CA, US
Tom Chi - San Jose CA, US
Billy Chow - Menlo Park CA, US
Patrick M. D'Souza - Mountain View CA, US
Parris Hawkins - Pleasanton CA, US
Charles Huang - Union City CA, US
Jett Jensen - Campbell CA, US
Badri N. Krishnamurthy - Mountain View CA, US
Pradeep M. Kulkarni - Sunnyvale CA, US
Prakash M. Kulkarni - Sunnyvale CA, US
Wen Fong Lin - San Jose CA, US
Shantha Mohan - Palo Alto CA, US
Bishnu Nandy - Union City CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

G06F 19/00

US Classification:

700121, 700 96, 700115

Abstract:

The present invention provides a novel distributed factory system framework including a novel factory automation lifecycle () having lifecycle activities for SW developing and integrating (), installing and administrating (), factory modeling (), manufacturing planning (), manufacturing controlling, monitoring and tracking () and analyzing of manufacturing results (). The factory lifecycle comprises framework components. The distributed factory system framework also includes application components and software building blocks. The framework components are adapted for managing the application components, while the application components are utilized to provide instructions for managing a process such as a wafer fab. The building blocks are adapted for forming or modifying framework and application components. The distributed factory system framework provides computer implemented methods for integrating processing systems and facilitates process and equipment changes.

US Patent:

7174230, Feb 6, 2007

Filed:

Feb 28, 2002

Appl. No.:

10/084092

Inventors:

John F. Arackaparambil - San Carlos CA, US
Tom Chi - San Jose CA, US
Billy Chow - Menlo Park CA, US
Patrick M. D'Souza - Mountain View CA, US
Parris Hawkins - Pleasanton CA, US
Charles Huang - Union City CA, US
Jett Jensen - Campbell CA, US
Badri N. Krishnamurthy - Mountain View CA, US
Pradeep M. Kulkarni - Sunnyvale CA, US
Prakash M. Kulkarni - Sunnyvale CA, US
Wen Fong Lin - San Jose CA, US
Shantha Mohan - Palo Alto CA, US
Bishnu Nandy - Union City CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

G06F 19/00

US Classification:

700 96, 700121

Abstract:

The present invention provides a novel distributed factory system framework including a novel factory automation lifecycle () having lifecycle activities for SW developing and integrating (), installing and administrating (), factory modeling (), manufacturing planning (), manufacturing controlling, monitoring and tracking () and analyzing of manufacturing results (). The factory lifecycle comprises framework components. The distributed factory system framework also includes application components and building blocks. The framework components are adapted to for managing the application components, while the application components are utilized to provide instructions for managing a process such as a wafer fab. The building blocks are adapted for forming or modifying framework and application components. The distributed factory system framework provides computer implemented methods for integrating processing systems and facilitates process and equipment changes.

US Patent:

20020128735, Sep 12, 2002

Filed:

Mar 8, 2001

Appl. No.:

09/800980

Inventors:

Parris Hawkins - Pleasanton CA, US
Badri Krishnamurthy - Fremont CA, US

International Classification:

G05B019/42

US Classification:

700/086000

Abstract:

An automated task guide system, method and medium for preventive maintenance and/or implementation of manufacturing activities in a manufacturing facility are described. At least some embodiments of the present invention envision a task guide software component configured to include a plurality of tasks to be performed manually or automatically. The plurality of tasks may include one or more optional tasks that are to be executed optionally, one or more floating tasks that are to be executed any time during the execution of the task guide, and one or more mandatory tasks that must be executed.

US Patent:

20030036815, Feb 20, 2003

Filed:

Aug 14, 2001

Appl. No.:

09/928474

Inventors:

Badri Krishnamurthy - Fremont CA, US
Parris Hawkins - Pleasanton CA, US

International Classification:

G06F019/00

US Classification:

700/095000

Abstract:

Systems, methods and mediums are provided for automating experiments within an automated environment without the need to disassociate the test subject (e.g., the semiconductor chip or chips) from that environment. An “experiment” may be a pre-planned deviation of an established (e.g., pre-defined) process utilizing the automated environment. A computer-implemented method, system and computer-readable medium for managing experiments, such as those relating to semiconductor technology. An experiment order includes some deviation from a base process capable of operating in an automated environment. An approval of the experiment order is obtained from a distribution list of users, while permitting the users to attach documents to the experiment order or perhaps modify the experiment. The experiment order is translated into processing data suitable for implementation by said automated environment, and stored. The experiment is caused to be executed in conjunction with at least some portion of said base process via the automated environment according to the processing data.