Benjamin J Petrone

US Patent:

48525162, Aug 1, 1989

Filed:

Sep 1, 1987

Appl. No.:

7/091651

Inventors:

Richard H. Rubin - Fairfield NJ
Benjamin J. Petrone - Netcong NJ
Richard C. Heim - Mountain View CA
Scott M. Pawenski - Wappingers Falls NY

Assignee:

Machine Technology, Inc. - Parsippany NJ

International Classification:

C23C 1400

US Classification:

118715

Abstract:

A self-contained modular processing apparatus is disclosed for processing workpieces, and in particular, silicon wafers. The apparatus is constructed of framed modules which plug into a service facility docking subassembly and interlock therewith to make up a complete modular processing system for wafer processing. Each module may be provided with its own wafer transporting mechanism and includes a built-in CPU such that each module is an independent, stand-alone processing unit. Each processing unit, by being capable of independent operation, functions as a building block to configure a modular processing system capable of handling wafer flow in multiple directions while performing a multitude of processing functions or operations. Individual modules are arranged along a line of single fold symmetry such that a single transport mechanism may be employed for transferring wafers among adjacent modules.

US Patent:

47222980, Feb 2, 1988

Filed:

May 19, 1986

Appl. No.:

6/865251

Inventors:

Richard H. Rubin - Fairfield NJ
Benjamin J. Petrone - Netcong NJ
Richard C. Heim - Mountain View CA
Scott M. Pawenski - Wappingers Falls NY

Assignee:

Machine Technology, Inc. - Parsippany NJ

International Classification:

C23C 1400

US Classification:

118715

Abstract:

A self-contained modular processing apparatus is disclosed for processing workpieces, and in particular, silicon wafers. The apparatus is constructed of framed modules which plug into a service facility docking subassembly and interlock therewith to make up a complete modular processing system for wafer processing. Each module may be provided with its own wafer transporting mechanism and includes a built-in CPU such that each module is an independent, stand-alone processing unit. Each processing unit, by being capable of independent operation, functions as a building block to configure a modular processing system capable of handling wafer flow in multiple directions while performing a multitude of processing functions or operations. Individual modules are arranged along a line of single fold symmetry such that a single transport mechanism may be employed for transferring wafers among adjacent modules.