Brian H. Stark - Ann Arbor MI, US Khalil Najafi - Ann Arbor MI, US
Assignee:
The Regents of the University of Michigan - Ann Arbor MI
International Classification:
B81C 1/00
US Classification:
430320, 430315, 430319, 205122
Abstract:
A low temperature method for forming a microcavity on a substrate and article having same are provided which utilize electroplated films. The method is particularly useful to package microelectromechanical systems (MEMS) in vacuum on the wafer level and provide sealed feedthroughs to the outside world. The method may be performed in a batch process to substantially reduce cost and to form metal diaphragms. Furthermore, the method is performed at near room temperature, which provides more flexibility in the manufacturing process. The method enables substantial cost savings in the production of vacuum-sealed MEMS. Many feedthroughs can be incorporated into the package to transfer signals in and out of the package. One significant advantage of this method is that it does not require bonding of a second substrate, which reduces the system cost.
A novel technology is provided for encapsulating electronics for use in harsh media applications, such as biomedical implants. The present invention includes electroplating a metal film on top of an insulating layer to hermetically seal an electronic system, microstructure, or micro device.
Dr. Stark graduated from the Philadelphia College of Osteopathic Medicine in 1993. He works in Fairview, PA and specializes in Family Medicine. Dr. Stark is affiliated with UPMC Hamot Medical Center.
Oct 2009 to Present Vice President, Corporate DevelopmentKeystone Strategy, Inc South San Francisco, CA Apr 2008 to Oct 2009 Strategy ConsultantRobert Bosch Group Palo Alto, CA Jun 2004 to Apr 2008 Program ManagerStark Software Norfolk, VA Jun 1994 to Jun 2004 Chief Executive OfficerJet Propulsion Laboratory Pasadena, CA Jun 1997 to Dec 1998 Student Intern
Education:
The University of Michigan Ann Arbor, MI May 2002 to May 2004 Ph.D. in Electrical Engineering and Computer ScienceThe University of Michigan Ann Arbor, MI Sep 1999 to May 2002 M.S. in Electrical Engineering and Computer ScienceCornell University Ithaca, NY Sep 1995 to May 1999 B.S. in Electrical and Computer EngineeringPhillips Academy Andover, MA Sep 1992 to May 1995 High School Diploma
Cleveland, OHPrincipal at Trustar Funding / The Stark Group of... I am a real estate financier.
My company - Trustar Funding - is a private, direct real estate lender. We makes loans to real estate investors, on houses and... I am a real estate financier.
My company - Trustar Funding - is a private, direct real estate lender. We makes loans to real estate investors, on houses and small commercial properties, typically to rehab and rent or resell, all over Northeast Ohio, and the New York / New Jersey Metro area. ...