Charles H Stone

US Patent:

7750420, Jul 6, 2010

Filed:

Mar 24, 2005

Appl. No.:

11/089921

Inventors:

Dean L. Field - Graham WA, US
Charles N. Stone - Leander TX, US
Michael W. Bruner - Saratoga CA, US

Assignee:

Cypress Semiconductor Corporation - San Jose CA

International Classification:

H01L 29/78

US Classification:

257416, 257414, 310313 R, 310313 B

Abstract:

An integrated circuit is provided which includes one or more device elements formed above a base substrate, a structure forming a sealed cavity above at least a portion of the one or more device elements, and one or more conductive devices formed above the sealed cavity. A method for fabrication of such an integrated circuit is also provided. An exemplary embodiment of the integrated circuit includes a surface acoustic wave device having a plurality of tracks each with a first interdigitated transducer configured to convert a receiving electric field energy into mechanical wave energy and a second interdigitated transducer configured to convert the mechanical wave energy into an output electric field energy. The SAW device also includes a conductor arranged above and spanning across at least two tracks of the plurality of tracks and coupled to the first interdigitated transducers of at least the two tracks.