A BiCMOS semiconductor device and a method of forming same are disclosed. A bipolar transistor region is formed adjacent a CMOS device region within a semiconductor substrate. Carbon is implanted in an amount ranging from about 10 to about 10 cm before forming the base, emitter and collector within the bipolar transistor region to aid in suppressing transient enhanced diffusion. The bipolar transistor region is subject to rapid thermal annealing to aid in suppressing the transient enhanced diffusion.
Method Of Forming Bipolar Transistors Comprising A Native Oxide Layer Formed On A Substrate By Rinsing The Substrate In Ozonated Water
Yi Ma - Orlando FL Yih-Feng Chyan - Orlando FL Chung Wai Leung - Orlando FL Jane Qian Liu - Orlando FL Timothy Scott Campbell - Gotha FL
Assignee:
Agere Systems Guardian Corp. - Allentown PA
International Classification:
H01L 2131
US Classification:
438343, 438765, 438770
Abstract:
A bipolar device ( ) includes an oxide layer ( ) which is grown on the surface ( ) of a semiconductor substrate ( ) by immersing the surface in ozonated deionized water. By selecting an appropriate temperature of the water and concentration of the ozone, the thickness of the film can be maintained within fine tolerances from lot to lot, and over the surface of a wafer (W) comprising the substrate.
Flash Memory Device Having A Bipolar Transistor Formed Integral Thereto And A Method Of Manufacture Therefor
The present invention provides a bipolar transistor for use in increasing a speed of a flash memory cell having a source region and a drain region and first and second complementary tubs. In one embodiment, a base for the bipolar transistor is located in the first complementary tub. The first complementary tub functions as a collector for the bipolar transistor. The bipolar transistor base also uniquely functions as the source region. The bipolar transistors emitter is also located in the first complementary tub and proximate the base. For example, the emitter may be located adjacent the base or actually located in the base. In an additional embodiment, the opposing bases and emitters are located on opposing sides of and proximate to the flash memory cell.
Bipolar Transistor With A Low K Material In Emitter Base Spacer Regions
Yih-Feng Chyan - Orlando FL Chunchieh Huang - Orlando FL Chung Wai Leung - Orlando FL Yi Ma - Orlando FL Shahriar Moinian - Murray Hill NJ
Assignee:
Agere Systems Inc. - Allentown PA
International Classification:
H01L 27082
US Classification:
257591, 257565
Abstract:
The present invention provides a bipolar transistor located on a semiconductor wafer substrate. The bipolar transistor may comprise a collector located in the semiconductor wafer substrate, a base located in the collector, and an emitter located on the base and in contact with at least a portion of the base, wherein the emitter has a low K layer located therein. The low K layer may be, for example, located proximate a side of the emitter, or it may be located proximate opposing sides of the emitter. In all embodiments, however, the low K layer does not interfere with the proper functioning of the bipolar transistor, and substantially reduces the emitter-base capacitance typically associated with conventional bipolar transistors.
Method Of Making A Bipolar Transistor With An Oxygen Implanted Emitter Window
Alan Sangone Chen - Windermere FL Yih-Feng Chyan - New Providence NJ Chung Wai Leung - Milpitas CA Yi Ma - Orlando FL William John Nagy - Orlando FL
Assignee:
Agere Systems Inc. - Allentown PA
International Classification:
H01L 218228
US Classification:
438323, 438324, 438343, 438365
Abstract:
The present invention provides a method of manufacturing a bipolar transistor. The method may comprise forming a collector in a semiconductor wafer substrate, forming a base in the collector, implanting an oxide region within said collector and over the base, and forming an emitter over the substrate such that the oxide region is located between the emitter and the base.
Method Of Reducing Dielectric Damage From Plasma Etch Charging
Richard William Gregor - Winter Park FL Chung Wai Leung - Orlando FL
Assignee:
Lucent Technologies Inc. - Murray Hill NJ
International Classification:
H01L 21336
US Classification:
438301
Abstract:
A method of suppressing damage to gate dielectrics by reducing the electrical field across the gate dielectric during plasma etching, photoresist stripping, or plasma assisted deposition of the overlying conductor to be etched. Openings in the gate oxide in the vicinity of the gates to be formed place the two conductive layers in contact with each other before the gates are formed and allows for the underlying conductive layer (usually the substrate) to be exposed to the plasma as the overlying unmasked conductive layer (usually polysilicon) is etched away. Preferably, the layer to be etched is deposited to be in contact with the underlying layer at the openings. This technique is applicable to integrated capacitor structures and other susceptible structures with a dielectric layer between two conductors.
Dayo Alugbin - Windmere FL Chung Wai Leung - Orlando FL Joseph Rudolph Radosevich - Orlando FL Ranbir Singh - Orlando FL Daniel Mark Wroge - Orlando FL
Assignee:
Lucent Technologies Inc. - Murray Hill NJ
International Classification:
H01L 218242
US Classification:
438239
Abstract:
A novel capacitor design for use in semiconductor integrated circuits is disclosed. The capacitor includes a metal-dielectric-metal stack formed within a window and upon a conductive substrate. Contact to the top plate of the capacitor is through a window within a window, while contact to the bottom plate is achieved by a guard ring which contacts the conductive substrate.
Erasable Memory Device And An Associated Method For Erasing A Memory Cell Therein
Patrick J. Kelley - Orlando FL Chung Wai Leung - Orlando FL Ranbir Singh - Orlando FL
Assignee:
Agere Systems Guardian Corp. - Murray Hill NJ
International Classification:
G11C 1604
US Classification:
36518507
Abstract:
An electrically erasable memory device includes a substrate and a plurality of single poly layer memory cells in the substrate. Each single poly layer memory cell includes a first MOS transistor in a first region in the substrate and spaced apart source and drain regions. Each single poly layer memory cell further includes a capacitor having a first electrode overlying a second region in the substrate and an insulating layer therebetween, and a third region in the second region defining a second electrode. An erasing circuit selectively erases the single poly layer memory cell by supplying a first voltage reference of a first polarity to the spaced apart source and drain regions, a second voltage reference of a second polarity to the first region, and a third voltage reference of the second polarity to the second electrode of the capacitor. The first and second voltage references bias the first MOS transistor so that the third voltage reference for erasing the single poly layer memory cell does not cause a junction breakdown of the first MOS transistor.
Instructor, "Mathematics of Money" at Johns Hopkins University, Center for Talented Youth
Location:
San Jose, California
Industry:
Education Management
Work:
Johns Hopkins University, Center for Talented Youth - Santa Cruz since Jun 2012
Instructor, "Mathematics of Money"
Cañada College - Redwood City Mar 2013 - Jun 2013
Instructional Aide II: Upward Bound Program
Intermune Jun 2011 - Dec 2012
Financial Department Associate
Cañada College Nov 2010 - May 2011
Instructional Aide I: Upward Bound Program
Johns Hopkins University's Center for Talented Youth Jun 2010 - Aug 2010
Teaching Assistant
Education:
Stanford University 2013 - 2014
Master of Arts (M.A.), Education Policy
University of California, Berkeley 2006 - 2009
Bachelor of Arts, Economics