David H Do

US Patent:

8372211, Feb 12, 2013

Filed:

Sep 14, 2010

Appl. No.:

12/881503

Inventors:

Joseph F. Sommers - San Jose CA, US
Jiansheng Wang - Union City CA, US
David Do - Milpitas CA, US
Satyanarayana Adamala - Fremont CA, US
Ronald Trahan - Beverton OR, US

Assignee:

Quantum Global Technologies, LLC - Dublin PA

International Classification:

B08B 7/04
B08B 3/04
B08B 3/10

US Classification:

134 26, 134 1, 134 10, 134 34, 134 36

Abstract:

Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component part. In one embodiment, a system for cleaning component parts in a cleaning chemistry is provided. The system comprises a wet bench set-up comprising a cleaning vessel assembly for holding one or more component parts to be cleaned during a cleaning process and a detachable cleaning cart detachably coupled with the cleaning vessel assembly for supplying one or more cleaning chemistries to the cleaning vessel assembly during the cleaning process.

US Patent:

20120216833, Aug 30, 2012

Filed:

Feb 24, 2011

Appl. No.:

13/034386

Inventors:

Jiansheng Wang - Union City CA, US
Barbara Stanczyk - Morgan Hill CA, US
Wendell Boyd, JR. - Morgan Hill CA, US
Kevin A. Papke - , US
Joseph F. Sommers - San Jose CA, US
David Do - Milpitas CA, US

Assignee:

APPLIED MATERIALS, INC. - Santa Clara CA

International Classification:

B08B 3/00

US Classification:

134 10, 134109

Abstract:

Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component. More particularly, embodiments of the present invention generally relate to a method and apparatus for endpoint detection during ex-situ cleaning of a chamber component used in a semiconductor processing chamber. In one embodiment, a system for cleaning parts disposed in a liner with a cleaning fluid is provided. The system comprises a portable cart, a liquid particle counter (LPC) carried by the portable cart, the LPC configured for detachable coupling to a fluid outlet port formed through the liner, the LPC operable to sample rinsate solution exiting the line, and a pump carried by the portable cart and configured for fluid coupling to the liner in a detachable manner, the pump operable to recirculate rinsate solution through the liner.

US Patent:

20130167885, Jul 4, 2013

Filed:

Jan 24, 2013

Appl. No.:

13/748709

Inventors:

Jiansheng Wang - Union City CA, US
David Do - Milpitas CA, US
Satyanarayana Adamala - Fremont CA, US
Ronald Trahan - Beverton OR, US

Assignee:

QUANTUM GLOBAL TECHNOLOGIES, LLC - Dublin PA

International Classification:

B08B 3/04

US Classification:

134 56 R, 134115 R, 1341042, 134 941

Abstract:

Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component part. In one embodiment, a system for cleaning component parts in a cleaning chemistry is provided. The system comprises a wet bench set-up comprising a cleaning vessel assembly for holding one or more component parts to be cleaned during a cleaning process and a detachable cleaning cart detachably coupled with the cleaning vessel assembly for supplying one or more cleaning chemistries to the cleaning vessel assembly during the cleaning process.

US Patent:

20200158623, May 21, 2020

Filed:

Jan 24, 2020

Appl. No.:

16/752287

Inventors:

- Franklin Lakes NJ, US
David Thao Do - San Jose CA, US
Timothy Wayne Petersen - Seattle WA, US
Jianying Cao - San Jose CA, US

International Classification:

G01N 15/14

Abstract:

Systems for detecting light (e.g., in a flow stream) are described. Light detection systems according to embodiments include two or more photodetector arrays and an optical adjustment component positioned in an optical path between the photodetector arrays. Systems and methods for measuring light emitted by a sample (e.g., in a flow stream) and kits having two or more photodetector arrays and an optical adjustment component are also provided.

US Patent:

20180246029, Aug 30, 2018

Filed:

Feb 12, 2018

Appl. No.:

15/894642

Inventors:

- Franklin Lakes NJ, US
David Thao Do - San Jose CA, US
Timothy Wayne Petersen - Seattle WA, US
Jianying Cao - San Jose CA, US

International Classification:

G01N 15/14

Abstract:

Systems for detecting light (e.g., in a flow stream) are described. Light detection systems according to embodiments include two or more photodetector arrays and an optical adjustment component positioned in an optical path between the photodetector arrays. Systems and methods for measuring light emitted by a sample (e.g., in a flow stream) and kits having two or more photodetector arrays and an optical adjustment component are also provided.

US Patent:

20160056061, Feb 25, 2016

Filed:

Nov 5, 2015

Appl. No.:

14/933832

Inventors:

- DUBLIN PA, US
Barbara Stanczyk - Morgan Hill CA, US
Wendell Boyd, JR. - Morgan Hill CA, US
Kevin A. Papke - Portland OR, US
Joseph F. Sommers - San Jose CA, US
David Do - Milpitas CA, US

International Classification:

H01L 21/67
B08B 3/14
B08B 3/10
H01L 21/677

Abstract:

Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component. More particularly, embodiments of the present invention generally relate to a method and apparatus for endpoint detection during ex-situ cleaning of a chamber component used in a semiconductor processing chamber. In one embodiment, a system for cleaning parts disposed in a liner with a cleaning fluid is provided. The system comprises a portable cart, a liquid particle counter (LPC) carried by the portable cart, the LPC configured for detachable coupling to a fluid outlet port formed through the liner, the LPC operable to sample rinsate solution exiting the line, and a pump carried by the portable cart and configured for fluid coupling to the liner in a detachable manner, the pump operable to recirculate rinsate solution through the liner.