David A Ferris

US Patent:

7163587, Jan 16, 2007

Filed:

Feb 8, 2002

Appl. No.:

10/071908

Inventors:

David William Kinnard - Olney MD, US
David Ferris - Rockville MD, US

Assignee:

Axcelis Technologies, Inc. - Beverly MA

International Classification:

C23C 16/48
C23F 1/10
H01L 21/306
C23C 16/52
C23F 1/00

US Classification:

118724, 118641, 118715, 15634537, 15634533

Abstract:

A reactor assembly and processing method for treating a substrate generally includes a base unit, a chuck assembly, a process chamber, an inlet manifold assembly and an exit manifold assembly. The inlet manifold assembly is in fluid communication with a first opening of the process chamber, wherein the inlet manifold assembly comprises a flow-shaping portion adapted to laterally elongate a gas and/or a reactant flow into the process chamber. The exhaust manifold assembly in fluid communication with a second opening of the process chamber and is diametrically opposed to the inlet manifold assembly. The process includes flowing a gas and/or reactive species into the process chamber of the reactor assembly in a direction that is about planar with the substrate surface providing improved uniformity and increased reactivity.

US Patent:

7449416, Nov 11, 2008

Filed:

Sep 1, 2005

Appl. No.:

11/217247

Inventors:

Alan F. Becknell - Ellicott City MD, US
Philip Hammar - Chevy Chase MD, US
David Ferris - Rockville MD, US

Assignee:

Axcelis Technologies, Inc. - Beverly MA

International Classification:

H01L 21/302

US Classification:

438725, 438710

Abstract:

A plasma ashing process for removing photoresist material and post etch residues from a substrate comprising carbon, hydrogen, or a combination of carbon and hydrogen, wherein the substrate comprises a low k dielectric layer, the process comprising forming a plasma from an essentially oxygen free and nitrogen free gas mixture; introducing the plasma into a process chamber, wherein the process chamber comprises a baffle plate assembly in fluid communication with the plasma; flowing the plasma through the baffle plate assembly and removing photoresist material, post etch residues, and volatile byproducts from the substrate; periodically cleaning the process chamber by introducing an oxygen plasma into the process chamber; and cooling the baffle plate assembly by flowing a cooling gas over the baffle plate assembly. A process chamber adapted for receiving downstream plasma, the process chamber comprising an upper baffle plate comprising at least one thermally conductive standoff in thermal communication with a wall of the process chamber; and a lower baffle plate spaced apart from the upper baffle plate.

US Patent:

8580076, Nov 12, 2013

Filed:

May 22, 2003

Appl. No.:

10/249962

Inventors:

Alan Frederick Becknell - Ellicott City MD, US
Thomas James Buckley - Ijamsville MD, US
David Ferris - Rockville MD, US
Aseem Kumar Srivastava - Germantown MD, US
Carlo Waldfried - Falls Church VA, US

Assignee:

LAM Research Corporation - Fremont CA

International Classification:

H01L 21/3065
C23C 16/00
C23C 16/4412
C23C 16/455
C23C 16/45561
C23C 16/45563
C23C 16/46
C23C 16/505
C23C 16/511

US Classification:

15634525, 15634529, 15634533, 15634534, 15634535, 15634536, 15634541, 15634548, 15634542, 118715, 118723 MW, 118723 ME, 118723 I, 118723 IR, 118725

Abstract:

A plasma apparatus, various components of the plasma apparatus, and an oxygen free and nitrogen free processes for effectively removing photoresist material and post etch residues from a substrate with a carbon and/or hydrogen containing low k dielectric layer(s).

US Patent:

20050241767, Nov 3, 2005

Filed:

Apr 30, 2004

Appl. No.:

10/836516

Inventors:

David Ferris - Rockville MD, US
Aseem Srivastava - Germantown MD, US
Maw Tun - Rockville MD, US

International Classification:

C23F001/00

US Classification:

156345350

Abstract:

A plasma processing system includes at least one multi-piece baffle plate. The multi-piece baffle plate assembly generally comprises at least one annular shaped ring portion having an opening and an insert portion dimensioned to sit within the opening. The individual pieces can be formed of a ceramic material. The effects caused by thermal gradients in the plate during plasma processing are minimized.

US Patent:

46971033, Sep 29, 1987

Filed:

Mar 10, 1986

Appl. No.:

6/838519

Inventors:

David A. Ferris - West Buxton ME
Daniel J. DeSimone - Buxton ME

Assignee:

Quadic Systems, Inc. - South Portland ME

International Classification:

H03K 19088
H03K 1716
H03K 1900
H03K 326

US Classification:

307456

Abstract:

A multi-terminal transistor circuit structure is described for TTL applications including current sinking and "pull-down" transistor circuit elements. A transistor pair is coupled with the emitter of the second transistor coupled to the base of the first transistor. The collector and emitter of the first transistor provide first and second terminals and the bases of the transistor pair provide independent third and fourth terminals or current controlled inputs. The new circuit structure is incorporated in a tranistor transistor logic (TTL) output buffer circuit and provides first and second pull-down transistor elements having the emitter of the second transistor coupled to the base of the first pull-down transistor. An independent base drive is coupled to the base of the second pull-down transistor element. The second stage pull-down transistor element introduces full square law enhancement of. beta. sup.

US Patent:

46617272, Apr 28, 1987

Filed:

Jul 19, 1984

Appl. No.:

6/632433

Inventors:

David A. Ferris - West Buxton ME
Richard J. Caswell - Swindon, GB2

Assignee:

Fairchild Semiconductor Corporation - Palo Alto CA

International Classification:

H03K 19013
H03K 19088
H03K 1704
H03K 1760

US Classification:

307456

Abstract:

A multiple phase-splitter TTL tristate output circuit having a feedback diode coupled between the signal output and the collector of a first phase-splitter transistor to accelerate sinking of current from the output to low potential during transition of binary signals at the output from high to low potential. An independent base drive is coupled to the base of the first phase-splitter transistor independent from any base drive coupled to the other phase-splitter transistor or transistors. Current hogging of the base drive current to the first phase-splitter transistor by the other phase-splitter transistors is thereby prevented. The first phase-splitter transistor which is coupled in the feedback circuit with the accelerating feedback diode to the base of the pulldown transistor element can therefore maintain the high current sinking mode through the pulldown transistor element with gain step-up proportional to. beta. sup. 2 when the output is at the high voltage level.

US Patent:

43341578, Jun 8, 1982

Filed:

Feb 22, 1980

Appl. No.:

6/123717

Inventors:

David A. Ferris - West Buxton ME

Assignee:

Fairchild Camera and Instrument Corp. - Mountain View CA

International Classification:

H03K 3288
H03K 1700

US Classification:

307291

Abstract:

A data latch of the kind having at least two operative modes, a transmitting or transparent mode or condition for transmitting data signals through the latch, and a latching mode or condition for latching and temporary storage by feedback of data signals in the latch. According to the invention there is provided in the data latch a pregate for pregating feedback signals in the latch. The pregate is adapted and coupled to provide positive feedback data signals for reinforcing previously entered data in the latching mode, and gating signals for passing input data in the transmitting mode.

US Patent:

61758612, Jan 16, 2001

Filed:

Feb 6, 1998

Appl. No.:

9/020196

Inventors:

Henry R. Williams - New York NY
David A. Ferris - West Buxton ME
Maurice B. Richard - Gorham ME

International Classification:

H04N 538
H04H 100
H04H 114

US Classification:

709217

Abstract:

A method and apparatus are provided for enabling multiple users to concurrently access a PC-based server in a home local area network using conventional TVs as display devices. A client system includes a TV, conventional input devices, such as a keyboard and a mouse, and a set top box for interfacing the TV to the network. The server maintains a system work area and multiple processes corresponding to user applications. The system work area is partitioned in the server into multiple independent, simultaneously active desktops, one desktop for each of the client systems. Individual processes are mapped to the appropriate desktop. Multiple frame buffers are maintained in the server, such that a different frame buffer is assigned to each client system. Each desktop is rendered within the server and stored in the corresponding frame buffer. The contents of each frame buffer are transmitted over a transmission medium to the set top box of the corresponding client system.