Lin Zhou

US Patent:

7305320, Dec 4, 2007

Filed:

Feb 15, 2006

Appl. No.:

11/307640

Inventors:

Ejaj Ahmed - Chicago IL, US
Charles N. Archie - Granite Springs NY, US
Stephen W. Goodrich - South Burlington VT, US
Eric P. Solecky - Hyde Park NY, US
Georgios A. Vakas - Poughkeepsie NY, US
Erwin E. Weissmann - Southbury CT, US
Lin Zhou - LaGrangeville NY, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

G01B 7/00
G01R 31/26

US Classification:

702155, 438 14

Abstract:

A method of preparing recipes for operating a metrology tool, each recipe including a set of instructions for measuring dimensions in a microelectronic feature. A database includes a plurality of known instructions with best known methods for measuring different feature dimensions by creating a summary of a recipes used by the tool, and adding categorization attributes to identify the summary for retrieval from the database. There is provided a desired recipe having instructions for measuring desired dimensions, including a summary of parameters relating to tool function for the feature dimension to be measured. The method includes comparing the instructions in the desired recipe with the instructions in the database, identifying differences therebetween, modifying the desired recipe instructions to conform to the database instructions, verifying the desired recipe prior to using the modified desired recipe by the tool, and using the desired recipe to execute a feature measurement on the tool.

US Patent:

7716009, May 11, 2010

Filed:

Nov 8, 2007

Appl. No.:

11/936971

Inventors:

Ejaj Ahmed - Chicago IL, US
Charles N. Archie - Granite Springs NY, US
Stephen W. Goodrich - South Burlington VT, US
Eric P. Solecky - Hyde Park NY, US
Georgios A. Vakas - Poughkeepsie NY, US
Erwin E. Weissmann - Southbury CT, US
Lin Zhou - LaGrangeville NY, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

G01B 7/00
G01R 31/26

US Classification:

702155, 438 14

Abstract:

A method of preparing recipes of operating a metrology tool, wherein each recipe includes a set of instructions for measuring at least one dimension in a microelectronic feature. There is provided a desired recipe having instructions for measuring one or more desired dimensions, the desired recipe or portion thereof including a summary of parameters relating to metrology tool function with respect to the microelectronic feature dimension to be measured. The method includes comparing the instructions in the desired recipe with the instructions in a database, identifying differences between the instructions in the desired recipe and the instructions in the database, modifying the instructions in the desired recipe to conform to the instructions in the database, verifying the desired recipe prior to using the modified desired recipe by the metrology tool, and using the desired recipe to execute a microelectronic feature measurement on the metrology tool.