Martin L Blazic

US Patent:

50322460, Jul 16, 1991

Filed:

May 17, 1990

Appl. No.:

7/524607

Inventors:

Martin L. Blazic - Bexley OH
Roy A. Calligaro - Richardson TX

Assignee:

Tosoh SMD, Inc. - Grove City OH

International Classification:

C23C 1434

US Classification:

20429812

Abstract:

A cathode sputtering mechanism is disclosed having a target nest and a target located within the target nest. The target nest includes a threaded internal peripheral surface which is complementary to external threads on the outer peripheral surface of the target. The target also includes a central opening having a tapered upwardly facing surface having apertures extending vertically into the tapered surface. A removal wrench includes a cylindrical ring having at its lower end a tapered surface which matches the tapered surface on the target. The wrench also includes torque pins extending into the tapered surface of the cylindrical ring which are disposed in complementary spacial relationship with the apertures in the target.

US Patent:

53244060, Jun 28, 1994

Filed:

Sep 10, 1992

Appl. No.:

7/942949

Inventors:

Edward M. Anderson - Johnstown OH
Martin L. Blazic - Pickerington OH
Susan M. Lannutti - Columbus OH

Assignee:

Tosoh SMD, Inc. - Grove City OH

International Classification:

C25D 1716

US Classification:

204224R

Abstract:

An automatic electrodeposition apparatus is disclosed. The desired substrate is brush plated by moving the brush on top of the plate. The brush may be selectively, and sequentially supplied with any one of a number of working solutions comprising conventional cleaning and plating solutions. De-ionized water and pressurized air may also be selectively fed to the brush for cleaning at desired time or job intervals throughout operation of the machine. A programmable logic controller controls feed of working solution, water, and air flow to the brush. It also controls brush movement and monitors electrodeposition through measurement of ampere-hours spent during operation.

US Patent:

51475219, Sep 15, 1992

Filed:

May 20, 1991

Appl. No.:

7/702885

Inventors:

Robert L. Belli - Columbus OH
Martin L. Blazic - Bexley OH
Rick O. Eller - Orient OH
Kenneth B. Fielder - Circleville OH
Conrad E. Fuchs - Grove City OH

Assignee:

Tosoh SMD, Inc. - Grove City OH

International Classification:

C23C 1434

US Classification:

20429812

Abstract:

A sputtering target assembly is disclosed having a sputtering gun with an inner and outer annular wall, where the inner annular wall has a plurality of radially projecting set screws, threadably movable within threaded apertures in the inner annular wall. A mounting ring is profiled to fit over the inner annular wall, the mounting ring having a recessed grove, into which the set screws are received, to secure the mounting ring. The mounting ring includes a plurality of radially disposed spring plungers which are threadably installed in threaded apertures in the mounting ring. The target has a grooved inner annular surface for receiving the spring ball plungers, whereby the target is retained to the sputtering gun.