Michael R Paradise

US Patent:

20050067389, Mar 31, 2005

Filed:

Sep 25, 2003

Appl. No.:

10/670765

Inventors:

James Greer - Andover MA, US
Brendan Howard - Westford MA, US
Michael Paradise - Windham NH, US
Sergey Ivnitskiy - Beverly MA, US
David Lations - Manchester MA, US

International Classification:

B23K026/00

US Classification:

219121680, 427596000

Abstract:

In a method and apparatus for pulsed laser deposition, a target is eroded more uniformly by employing a two-stage laser scanning process. In a first stage, a pulsed laser strikes the target along an x/y scan pattern across the surface of the target while the target is rotationally fixed. In a second stage, the target is rotated by an incremental angle. These two stages are continuously repeated in sequence throughout the pulsed laser deposition process.