Peter R Mccann

US Patent:

6483336, Nov 19, 2002

Filed:

May 3, 2000

Appl. No.:

09/564591

Inventors:

Daniel L. Harris - Beaverton OR
Peter R. McCann - Beaverton OR

Assignee:

Cascade Microtech, Inc. - Beaverton OR

International Classification:

G01R 3126

US Classification:

324765, 324758, 324754, 269 21

Abstract:

The arrangement of test points on an integrated circuit (IC) undergoing testing in a probe station often requires rotation of the IC or the probes when performing a series of tests. A chuck with indexed rotation promotes rapid rotation of the device under test to a new test position and increases the productivity of the probe station. The device under test is mounted on a device mounting member that is affixed to a shaft rotationally mounted in a base. A resilient seal supports the device mounting member and forms a sealed chamber over a substantial part of the area of the device mounting member. Applying vacuum or pressure to the sealed chamber urges the device mounting member and base toward contact. The support provided by the resilient seal over substantial portion of device mounting members diameter promotes stability and consistent planarity of the device mounting member without regard to the orientation of the shaft to device mounting member.

US Patent:

6771090, Aug 3, 2004

Filed:

Jun 24, 2002

Appl. No.:

10/179796

Inventors:

Daniel L. Harris - Beaverton OR
Peter R. McCann - Beaverton OR

Assignee:

Cascade Microtech, Inc. - Beaverton OR

International Classification:

G01R 3126

US Classification:

324765, 324537, 269 21

Abstract:

The arrangement of test points on an integrated circuit (IC) undergoing testing in a probe station often requires rotation of the IC or the probes when performing a series of tests. A chuck with indexed rotation promotes rapid rotation of the device under test to a new test position and increases the productivity of the probe station. The device under test is mounted on a device mounting member that is affixed to a shaft rotationally mounted in a base. A resilient seal supports the device mounting member and forms a sealed chamber over a substantial part of the area of the device mounting member. Applying vacuum or pressure to the sealed chamber urges the device mounting member and base toward contact. The support provided by the resilient seal over substantial portion of device mounting members diameter promotes stability and consistent planarity of the device mounting member without regard to the orientation of the shaft to device mounting member.

US Patent:

6836135, Dec 28, 2004

Filed:

Aug 7, 2002

Appl. No.:

10/214888

Inventors:

Daniel L. Harris - Beaverton OR
Peter R. McCann - Beaverton OR

Assignee:

Cascade Microtech, Inc. - Beaverton OR

International Classification:

G01R 3102

US Classification:

324765, 158754, 158758

Abstract:

A chuck adapted to test electrical and/or optical components on a device-under-test (DUT).

US Patent:

6885197, Apr 26, 2005

Filed:

May 28, 2004

Appl. No.:

10/856279

Inventors:

Daniel L. Harris - Beaverton OR, US
Peter R. McCann - Beaverton OR, US

Assignee:

Cascade Microtech, Inc. - Beaverton OR

International Classification:

H01H031/02
G01R031/02

US Classification:

324537, 324754

Abstract:

A rotary chuck with indexed rotation promotes rapid rotation of a device under test and increases the productivity of a probe station on which the device is being tested. A device mounting member of a rotatable chuck is supported for rotation on a first surface of a base until a vacuum is applied drawing the device mounting member into contact with a second surface of the base and constraining the device mounting member against rotation.

US Patent:

6970634, Nov 29, 2005

Filed:

May 4, 2001

Appl. No.:

09/849152

Inventors:

Peter R. McCann - Beaverton OR, US
John T. Martin - Portland OR, US

Assignee:

Cascade Microtech, Inc. - Beaverton OR

International Classification:

G02B006/00

US Classification:

385139, 385117, 3562411, 607 93

Abstract:

A fiber optic wafer probe that includes a fiber optic cable for approaching a device under test.

US Patent:

7298536, Nov 20, 2007

Filed:

Sep 7, 2005

Appl. No.:

11/221676

Inventors:

Peter R. McCann - Beaverton OR, US
John T. Martin - Portland OR, US

Assignee:

Cascade Microtech, Inc. - Beaverton OR

International Classification:

G02B 6/06

US Classification:

359117, 600182, 607 93

Abstract:

A fiber optic wafer probe that includes a fibre optic cable for approaching a device under test.

US Patent:

7420381, Sep 2, 2008

Filed:

Sep 8, 2005

Appl. No.:

11/222275

Inventors:

Terry Burcham - Hillsboro OR, US
Peter McCann - Beaverton OR, US
Rod Jones - Gaston OR, US

Assignee:

Cascade Microtech, Inc. - Beaverton OR

International Classification:

G01R 31/26
G01R 31/02

US Classification:

324754, 324758, 324761, 324765

Abstract:

A test configuration for double sided probing of a device under test includes a holder to secure the device under test in a first orientation, a calibration substrate secured in a second orientation and a probe capable of calibration using the calibration substrate and probing the device under test.

US Patent:

7492172, Feb 17, 2009

Filed:

Apr 21, 2004

Appl. No.:

10/829869

Inventors:

Craig Stewart - Bloxham, GB
Anthony Lord - Great Bourton, GB
Jeff Spencer - Portland OR, US
Terry Burcham - Portland OR, US
Peter McCann - Beaverton OR, US
Rod Jones - Portland OR, US
John Dunklee - Tigard OR, US
Tim Lesher - Portland OR, US
David Newton - Portland OR, US

Assignee:

Cascade Microtech, Inc. - Beaverton OR

International Classification:

G01R 31/02
G01R 31/00

US Classification:

324754, 324756, 324758, 324761, 324765

Abstract:

A chuck that includes an upper surface for supporting a device under test and a conductive element that extends through the chuck to the upper surface of the chuck. The conductive element is electrically isolated from the upper surface of the chuck, and makes electrical contact with any device under test supported by the chuck.