Richard C Ockovic

US Patent:

6383257, May 7, 2002

Filed:

Apr 4, 2000

Appl. No.:

09/542995

Inventors:

Wayne Thomas McDermott - Fogelsville PA
Richard Carl Ockovic - Northampton PA
Alexander Schwarz - Bethlehem PA
Rakesh Agrawal - Emmaus PA

Assignee:

Air Products and Chemicals, Inc. - Allentown PA

International Classification:

B01D 5322

US Classification:

95 41, 62616, 62640, 62655, 95 42, 95 45, 95 50, 95 90, 95232, 95288, 96 4, 96134, 96243

Abstract:

An apparatus and process for separating perfluorocarbon compounds from a gas mixture passes an incoming stream of a gas into a cold trap, the gas stream including a plurality of perfluorocarbon compounds. The gas mixture is cooled within the cold trap to a temperature below -100Â C. to produce a condensate that is enriched in at least one perfluorocarbon compound and a non-condensed stream from which the condensate was separated. The condensate is withdrawn from the cold trap. The condensate may be withdrawn by warming the cold trap to vaporize the condensate and thereafter flowing the vaporized condensate into a storage vessel. The non-condensed stream may be vented to the atmosphere, re-circulated into the cold trap or flowed through subsequent separation processes to extract additional perfluorocarbon compounds.

US Patent:

6436170, Aug 20, 2002

Filed:

Jun 23, 2000

Appl. No.:

09/602933

Inventors:

Wayne Thomas McDermott - Fogelsville PA
Richard Carl Ockovic - Northampton PA

Assignee:

Air Products and Chemical, Inc. - Allentown PA

International Classification:

B03C 301

US Classification:

95 58, 95 60, 95 73, 95 74, 96 28, 96 74, 96 88, 96 97

Abstract:

An apparatus for removing particles from a gas in a high purity flowing gas system is provided which includes a flow tube inserted inline in the flowing gas system having an inlet and an outlet, a pressure sealed, electrically insulated feed-through integral to the flow tube, an emitter inserted through the feed-through into the flow tube to create a plasma in the gas to charge particles in the gas, and a collector surface in proximity to the emitter; whereby an electric field between the emitter and the collector surface draws the particles in the gas to the collector surface. An apparatus for removing particles from a gas in a high purity gas containment vessel is also provided which includes a gas containment vessel having an inlet orifice, a pressure sealed, electrically insulated feed-through sealingly attached adjacent the inlet orifice, an emitter inserted through the feed-through into the gas containment vessel to create a plasma in the gas to charge particles in the gas; and a collector surface in proximity to the emitter, whereby an electric field between the emitter and the collector surface draws the particles in the gas to the collector surface. Methods of using the above apparatus are also provided.

US Patent:

6469780, Oct 22, 2002

Filed:

Dec 21, 1998

Appl. No.:

09/217113

Inventors:

Wayne Thomas McDermott - Fogelsville PA
Richard Carl Ockovic - Northampton PA

Assignee:

Air Products and Chemicals, Inc. - Allentown PA

International Classification:

G01N 100

US Classification:

356 37, 356335, 356336

Abstract:

An apparatus and a method are disclosed for detecting particles in a particle-containing gas at a pressure greater than about 0 psig. The apparatus includes a gas distribution line containing a pressurized gas having a pressure greater than about 0 psig and a condensation nucleus counter in fluid communication with the pressurized gas in the gas distribution line. The condensation nucleus counter is adapted to receive a stream of the pressurized gas at a pressure substantially equal to the pressure of the pressurized gas in the gas distribution line. The condensation nucleus counter is constructed of materials resistant to corrosion and to reaction with the pressurized gas, which may be one or more reactive or toxic gases, such as those used in microchip processing, or an inert gas.

US Patent:

6517608, Feb 11, 2003

Filed:

Jun 28, 2002

Appl. No.:

10/187342

Inventors:

Wayne Thomas McDermott - Fogelsville PA
Richard Carl Ockovic - Northampton PA

Assignee:

Air Products and Chemicals, Inc. - Allentown PA

International Classification:

B03C 301

US Classification:

95 58, 96 30, 96 88, 96 96, 96 97

Abstract:

An apparatus for removing particles from a gas in a high purity flowing gas system is provided which includes a flow tube inserted inline in the flowing gas system having an inlet and an outlet, a pressure sealed, electrically insulated feed-through integral to the flow tube, an emitter inserted through the feed-through into the flow tube to create a plasma in the gas to charge particles in the gas, and a collector surface in proximity to the emitter; whereby an electric field between the emitter and the collector surface draws the particles in the gas to the collector surface. An apparatus for removing particles from a gas in a high purity gas containment vessel is also provided which includes a gas containment vessel having an inlet orifice, a pressure sealed, electrically insulated feed-through sealingly attached adjacent the inlet orifice, an emitter inserted through the feed-through into the gas containment vessel to create a plasma in the gas to charge particles in the gas; and a collector surface in proximity to the emitter, whereby an electric field between the emitter and the collector surface draws the particles in the gas to the collector surface. Methods of using the above apparatus are also provided.

US Patent:

7282099, Oct 16, 2007

Filed:

Sep 24, 2002

Appl. No.:

10/253296

Inventors:

Wayne Thomas McDermott - Fogelsville PA, US
Richard Carl Ockovic - Northampton PA, US
Alexander Schwarz - Bethlehem PA, US

Assignee:

Air Products and Chemicals, Inc. - Allentown PA

International Classification:

B08B 3/00

US Classification:

134 34, 134 2, 134 3, 134 10, 134 11, 134 12, 134 254, 134 31, 134 35, 134 42, 438906

Abstract:

Method for processing an article by contacting the article with a dense fluid. The article is introduced into a sealable processing chamber and the processing chamber is sealed. A dense fluid is prepared by introducing a subcritical fluid into a pressurization vessel and isolating the vessel, and then heating the subcritical fluid at essentially constant volume and essentially constant density to yield a dense fluid. At least a portion of the dense fluid is transferred from the pressurization vessel to the processing chamber, wherein the transfer of the dense fluid is driven by the difference between the pressure in the pressurization vessel and the pressure in the processing chamber, thereby pressurizing the processing chamber with transferred dense fluid. The article is contacted with the transferred dense fluid to yield a spent dense fluid and a treated article, and the spent dense fluid is separated from the treated article.

US Patent:

7439654, Oct 21, 2008

Filed:

Feb 24, 2004

Appl. No.:

10/785298

Inventors:

Wayne Thomas McDermott - Fogelsville PA, US
Dean Van-John Roth - Center Valley PA, US
Richard Carl Ockovic - Northampton PA, US

Assignee:

Air Products and Chemicals, Inc. - Allentown PA

International Classification:

H01L 41/04

US Classification:

31032319, 310334

Abstract:

Ultrasonic probe comprising an elongate body having a first end and a second end, an ultrasonic transducer attached to the probe at or adjacent the first end, and an enlarged support section intermediate the ultrasonic transducer and the second end, wherein the enlarged support section has an equivalent diameter greater than an equivalent diameter of the body at any location between the enlarged support section and the ultrasonic transducer. The probe may be used to introduce ultrasonic energy into ultrasonic cleaning systems.

US Patent:

7867779, Jan 11, 2011

Filed:

Jan 27, 2006

Appl. No.:

11/340641

Inventors:

Wayne Thomas McDermott - Fogelsville PA, US
Richard Carl Ockovic - Northampton PA, US
Dean Van-John Roth - Center Valley PA, US

Assignee:

Air Products and Chemicals, Inc. - Allentown PA

International Classification:

G01N 1/22

US Classification:

436181, 436148, 436174, 436175, 436177, 436178, 422 83, 422 88, 422 93

Abstract:

A system and method for measuring and analyzing particles within a gas feed stream. In one aspect, the system includes a particle counter and a particle capture filter that are arranged in parallel. In another aspect, the system includes a purifying device to remove trace molecular impurities from a gas feed stream to reduce the presence of impurities.

US Patent:

20080000505, Jan 3, 2008

Filed:

Aug 2, 2007

Appl. No.:

11/832968

Inventors:

WAYNE MCDERMOTT - FOGELSVILLE PA, US
HOSHANG SUBAWALLA - SPRING TX, US
ANDREW JOHNSON - DOYLESTOWN PA, US
ALEXANDER SCHWARZ - BETHLEHEM PA, US
RICHARD OCKOVIC - NORTHAMPTON PA, US

Assignee:

AIR PRODUCTS AND CHEMICALS, INC. - Allentown PA

International Classification:

B08B 13/00

US Classification:

134105000

Abstract:

Apparatus for processing an article with a single-phase supercritical dense processing fluid in a processing chamber while applying ultrasonic energy during processing. The single-phase supercritical dense fluid may be generated in a separate pressurization vessel and transferred to the processing chamber, or alternatively may be generated directly in the processing chamber. A processing agent may be added to the pressurization vessel, to the processing chamber, or to the single-phase supercritical dense fluid during transfer from the pressurization vessel to the processing chamber. The ultrasonic energy may be generated continuously at a constant frequency or at variable frequencies. Alternatively, the ultrasonic energy may be generated intermittently.