Andrew G. Huibers - Palo Alto CA, US Steve Chiang - Saratoga CA, US Robert M. Duboc - Menlo Park CA, US Thomas J. Grobelny - Snohomish WA, US Hung Nan Chen - Kaohsiung, TW Dietrich Dehlinger - Sebastopol CA, US Peter W. Richards - Palo Alto CA, US Hongqin Shi - San Jose CA, US Anthony Sun - San Jose CA, US
Assignee:
Texas Instruments Incorporated - Dallas TX
International Classification:
G02B 26/00
US Classification:
359291, 359290, 359292, 359298
Abstract:
A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material andlor solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.
Disclosed herein is a method of operating display systems with reduction of the warm-up time of an arc lamp in the event of an accidental or unintentional turn-off.
Disclosed herein is a device package that comprises a device having a top substrate that is disposed on a supporting surface of a package substrate. A package frame contacts the top surface of the top substrate and top surface of the package substrate, and hermetically seals the device between the top surfaces of the top substrate and package substrate. The device can be a semiconductor device, a microstructure such as a microelectromechanical device, or other devices.
Self-Standing Spacer Wall Structures And Methods Of Fabricating And Installing Same
Theodore Fahlen - San Jose CA, US Alfred Conte - Hollister CA, US Robert Duboc - Menlo Park CA, US George Hopple - Palo Alto CA, US John O'Reilly - Cambell CA, US Vasil Chakarov - San Jose CA, US Robert Marion - San Jose CA, US Steve Cho - Santa Clara CA, US Robert Neimeyer - San Jose CA, US Jennifer Sun - Sunnyvale CA, US David Morris - San Jose CA, US Christopher Spindt - Menlo Park CA, US Kollengode Narayanan - Cupertino CA, US
International Classification:
H01B017/36
US Classification:
174/13800E
Abstract:
Methods and structures are provided which support spacer walls in a position which facilitates installation of the spacer walls between a faceplate structure and a backplate structure of a flat panel display. In one embodiment, spacer feet are formed at opposing ends of the spacer wall. These spacer feet can be formed of materials such as ceramic, glass and/or glass frit. The spacer feet support the corresponding spacer wall on the faceplate (or backplate) structure. Tacking electrodes can be provided on the faceplate (or backplate) structure to assert an electrostatic force on the spacer feet, thereby holding the spacer feet in place during installation of the spacer wall. The spacer wall can be mechanically and/or thermally expanded prior to attaching both ends of the spacer wall to the faceplate (or backplate) structure. The spacer wall is then allowed to contract, thereby introducing tension into the spacer wall which tends to straighten any inherent waviness in the spacer wall. Alternatively, spacer clips can be clamped onto opposing ends of a spacer wall to support the spacer wall during installation. The spacer clips can provide electrical connections to face electrodes located on the spacer wall.
Spatial Light Modulators With Light Absorbing Areas
Andrew Huibers - Mountain View CA, US Satyadev Patel - Elk Grove CA, US Robert Duboc - Menlo Park CA, US
Assignee:
REFLECTIVITY, INC., California corporation - Sunnyvale CA
International Classification:
G02B026/00
US Classification:
359/291000
Abstract:
A projection system, a spatial light modulator, and a method for forming micromirrors are disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting micromirror elements that are disposed within an array of such elements forming the spatial light modulator. In one embodiment, the substrate is a silicon substrate having circuitry and electrodes thereon for electrostatically actuating adjacent micromirror elements, and the substrate is fully or selectively covered with a light absorbing material.
Jonathan Doan - Mountain View CA, US Satyadev Patel - Elk Grove CA, US Robert Duboc - Menlo Park CA, US
International Classification:
G02B026/00
US Classification:
359/291000
Abstract:
A method and spatial light modulator are provided herein. The spatial light modulator has a higher resolution and an increased fill factor. The spatial light modulator also provides an increased contrast ratio. Furthermore, the spatial light modulator of the present invention can be operated in the absence of polarized light and that has improved electro-mechanical performance and robustness with respect to manufacturing. A method and its alternative are disclosed herein by the present invention for manufacturing the spatial light modulator.
Andrew Huibers - Palo Alto CA, US Satyadev Patel - Sunnyvale CA, US Peter Heureux - Felton CA, US Robert Duboc - Menlo Park CA, US Regis Grasser - Mountain View CA, US
International Classification:
G02B027/14
US Classification:
359634000
Abstract:
Disclosed herein is a micromirror-based display system having an improved contrast ratio with the deflection of the micromirrors accomplished through one addressing electrode associate with the micromirror.
Microelectromechanical Devices With Lubricants And Getters Formed Thereon
Robert Duboc - Menlo Park CA, US Jim Dunphy - San Jose CA, US
International Classification:
H01L023/02 H01L029/84
US Classification:
257415000, 257680000, 257682000
Abstract:
The present invention provides a packaged microelectromechanical device having a plurality of deflectable elements formed on a substrate that has a getter and/or a lubricant disposed thereon. The substrate can be a glass substrate or a semiconductor wafer. The lubricant and/or getter can be disposed on the substrate or held by one or more containers that are attached to the substrate.