Robert C Taff

US Patent:

6729945, May 4, 2004

Filed:

Mar 30, 2001

Appl. No.:

09/823722

Inventors:

Jeff Gasparitsch - Fremont CA
Robert Taff - Brentwood CA
Kenneth J. Bahng - Cupertino CA
Paul Stasiewicz - Fremont CA
Erik H. Engdahl - Livermore CA

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

B24B 2108

US Classification:

451303, 451307

Abstract:

A platen for use in chemical mechanical planarization (CMP) systems is disclosed. The platen is arranged below a linear polishing pad and designed to apply a controlled fluid flow to the underside of the linear polishing pad. The platen includes a leading zone containing a first plurality of output holes. The leading zone is oriented more proximate to an upstream region of the linear polishing pad. The platen also includes a trailing zone containing a second plurality of output holes. The trailing zone is oriented more proximate to a downstream region of the linear polishing pad. The leading zone and the trailing zone are independently controlled and designed to output the controlled fluid flow independently from each of the first plurality of output holes and the second plurality of output holes.

US Patent:

7963631, Jun 21, 2011

Filed:

Apr 25, 2006

Appl. No.:

11/912228

Inventors:

David Albertalli - Santa Clara CA, US
Robert Taff - Brentwood CA, US
Oleg N. Gratchev - San Jose CA, US

Assignee:

Ulvac, Inc. - Kanagawa

International Classification:

B41J 2/165

US Classification:

347 29, 347 28, 347 36

Abstract:

The present teachings relate to a printhead maintenance station for an industrial printing apparatus which is used to prevent clogging of the printhead, particularly during periods in which the printheads are idle. The maintenance station includes a capping station which has sockets for keeping the printheads moist and a blotting station for cleaning any residual printing fluids prior to carrying out a print function.

US Patent:

7976123, Jul 12, 2011

Filed:

Apr 25, 2006

Appl. No.:

11/912177

Inventors:

Paul A. Parks - Austin TX, US
Robert F. Taff - Brentwood CA, US
Roy M. Patterson - Round Rock TX, US
David Albertalli - Santa Clara CA, US
Cheuk Lee - Castro Valley CA, US
Ben J. Sy - Austin TX, US

Assignee:

Ulvac, Inc. - Chigasaki, Kanagawa

International Classification:

B41J 23/00

US Classification:

347 37, 347 40

Abstract:

According to the present disclosure, a printer apparatus may include a chuck configured to support a substrate thereon, a rail spaced apart from the chuck, a printhead carriage frame coupled to the rail, and a printhead carriage pivotally coupled to the printhead carriage frame.