Roger C Callahan

US Patent:

7941286, May 10, 2011

Filed:

Nov 28, 2006

Appl. No.:

11/563822

Inventors:

Roger B. Proksch - Santa Barbara CA, US
Roger C. Callahan - Goleta CA, US

Assignee:

Asylum Research Corporation - Goleta CA

International Classification:

G01R 13/00

US Classification:

702 66, 702127, 702137, 702168

Abstract:

Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.

US Patent:

8024963, Sep 27, 2011

Filed:

Jun 16, 2008

Appl. No.:

12/214031

Inventors:

Roger Proksch - Santa Barbara CA, US
Roger C. Callahan - Goleta CA, US

Assignee:

Asylum Research Corporation - Goleta CA

International Classification:

G01B 5/28
G01Q 10/00

US Classification:

73105, 850 1, 850 5, 850 33

Abstract:

Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.

US Patent:

8489356, Jul 16, 2013

Filed:

May 10, 2011

Appl. No.:

13/104189

Inventors:

Roger B. Proksch - Santa Barbara CA, US
Roger C. Callahan - Goleta CA, US

Assignee:

Oxford Instruments, PLC - Oxfordshire
Oxford Instruments AFM, Inc. - Pleasanton CA

International Classification:

G01R 13/00
G01B 5/28

US Classification:

702 96, 702158, 2504923, 25049222

Abstract:

Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.

US Patent:

8555711, Oct 15, 2013

Filed:

Sep 23, 2011

Appl. No.:

13/241689

Inventors:

Roger Proksch - Santa Barbara CA, US
Roger C. Callahan - Goleta CA, US

Assignee:

Asylum Research Corporation - Goleta CA

International Classification:

G01Q 10/00
G01Q 60/32

US Classification:

73105, 850 1, 850 5, 850 37

Abstract:

Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.

US Patent:

20140041084, Feb 6, 2014

Filed:

Oct 13, 2013

Appl. No.:

14/052750

Inventors:

Roger Proksch - Santa Barbara CA, US
Roger C. Callahan - Goleta CA, US

Assignee:

Oxford Instruments AFM, Inc - Pleasanton CA
Oxford Instruments PLC - Oxfordshire

International Classification:

G01Q 60/24

US Classification:

850 33

Abstract:

Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.

US Patent:

20160313369, Oct 27, 2016

Filed:

Jul 5, 2016

Appl. No.:

15/202445

Inventors:

- Goleta CA, US
Roger C. Callahan - Goleta CA, US
Frank Stetter - Garching, DE
Ted Limpoco - Goleta CA, US
Sophia Hohlbauch - Goleta CA, US
Jason Bemis - Goleta CA, US
Jason Cleveland - Ventura CA, US

International Classification:

G01Q 60/24

Abstract:

Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.

US Patent:

20150377920, Dec 31, 2015

Filed:

Jun 30, 2015

Appl. No.:

14/755273

Inventors:

- Santa Barbara CA, US
Roger C. Callahan - Goleta CA, US

International Classification:

G01Q 10/00

Abstract:

Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.

US Patent:

20150301080, Oct 22, 2015

Filed:

Apr 21, 2015

Appl. No.:

14/692270

Inventors:

- Goleta CA, US
Roger C. Callahan - Goleta CA, US
Frank Stetter - Goleta CA, US
Ted Limpoco - Goleta CA, US
Sophia Hohlbach - Santa Barbara CA, US
Jason Bemis - Santa Barbara CA, US
Jason Cleveland - Ventura CA, US

International Classification:

G01Q 60/24
G01Q 70/08

Abstract:

Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.