William Brock Alexander - St. George UT, US Sang-ho Lee - North Wales PA, US Thomas Mercer - Annapolis MD, US Vasil Vorsa - Coopersburg PA, US
International Classification:
C23F 11/00
US Classification:
216 41, 1563453
Abstract:
Included within the scope of the invention are plasma etch-resistant films for substrates. The films include a yttria material and a at least a portion of the yttria material is in a crystal phase having an orientation defined by a Miller Index notation {111}. Also included are methods of manufacturing plasma etch-resistant films on a substrate. Such methods include applying a yttria material-containing composition onto at least a portion of a surface of a substrate to form a film. The film includes a yttria material and at least a portion of the yttria material is in a crystal phase having an orientation defined by a Miller Index notation {111}.
Plasma Etch Resistant Films, Articles Bearing Plasma Etch Resistant Films And Related Methods
Mohammed Ameen - Souderton PA, US Sang-Ho Lee - North Wales PA, US Thomas Mercer - Annapolis MD, US Vasil Vorsa - Coopersburg PA, US
International Classification:
C01F 17/00 C23C 16/40 H01L 21/02
US Classification:
428220, 423263, 4272481, 427576, 427535, 216 67
Abstract:
The invention includes a plasma etch-resistant film for a substrate comprising a yttria material wherein at least a portion of the yttria material is in a crystal phase having a crystal lattice structure, wherein at least 50% of the yttria material is in a form of a monoclinic crystal system. The film may be treated by exposure to a fluorine gas plasma. Also included are plasma etch-resistant articles that include a substrate and a film, wherein the film comprises an yttria material and at least a portion of the yttria material is present in the film in a crystal phase having a crystal lattice structure and at least 50% of the yttria material is in a form of a monoclinic crystal system. Several methods are contemplated within the scope of the invention.
One business that looked into the exchange is Seattle-based Innate Health Service based in Seattle. Chief operating officer Thomas Mercer said he was hoping to buy coverage for his staff, which includes two in Seattle and one in Santa Monica, California. We were excited that now, finally we would b
Written and directed by FSPA Drama Instructor Nick Paone and FSPA Director Raye Lynn Mercer, Bye Bye Bieber will be presented on October 22 at 7:30 pm at the Thomas D. Mercer Auditorium, Horace Mann Middle School. This show, a parody loosely based on ...
FPAC Announces '11-'12 Season; The Nutcracker, Annie To Be Performed
FPAC will present the timeless holiday classic The Nutcracker with live orchestra and guest artists on December 10 and 11 at the Thomas D. Mercer Auditorium, Horace Mann Middle School, 224 Oak Street. Humbug!, an original musical based on Dickens' A ...
Potential challengers include Juan R. Rivera, a Finance Committee member; Jeffrey Roy, current chairman of the School Committee; Thomas Mercer, current chairman of the School Building Committee; and Robert Dellorco. Of the rest of the incumbents, ...
Franklin Performing Arts Co Hosts Auditions For THE NUTCRACKER
The Nutcracker will be performed on Saturday, December 10th at 7:30 pm and on Sunday, December 11th at 2:00 pm at the Thomas D. Mercer Auditorium, 224 Oak Street in Franklin. Monday, September 26th: The New England Center for the Performing Arts will ...
In 2008, a Gentek scientist by the name of Thomas Mercer stole a vial of the blacklight virus and it infected him. Gentek thought it would kill him but he developed superhuman strength and abilities. He later came back to Gentek to free Mother. ...
Current School Committee Chairman Jeffrey Roy, and current School Building Committee Chairman Thomas Mercer have taken out papers for Town Council, along with Juan Ramon Riveras. Three of the nine current town councilors, Chairman Scott Mason, ...
Franklin School Announces Their Upcoming Shows And Events
The show will be presented by FSPA on October 22 at 7:30 pm at the Thomas D. Mercer Auditorium, Horace Mann Middle School. For more information, visit www.fspaonline.com or call (508) 528-8668. Saturday, Saturday 17th: A "How to Audition" workshop will ...
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meridian community collegei live in meridian mississippi other names are hell lol. i am from georgia and i miss it alot and plan on going back after school. i love cage fighting and... i live in meridian mississippi other names are hell lol. i am from georgia and i miss it alot and plan on going back after school. i love cage fighting and football and metal music