Marvin Tabasky - Peabody MA Victor Cataldo - Wilmington MA Thomas W. Fitzgerald - Framingham MA Jagannath Chirravuri - Medfield MA Craig A. Armiento - Acton MA Paul O. Haugsjaa - Acton MA
Assignee:
GTE Laboratories Incorporated - Waltham MA
International Classification:
G02B 642
US Classification:
385 89
Abstract:
A waferboard assembly incorporates mechanical registration features into a substrate platform to facilitate the passive alignment of lasers integrated on a chip to fibers in integral contact with the substrate. The waferboard includes two front pedestal structures and one side pedestal structure, and two vertical post structures within a mounting region defined by the pedestal structures. The laser chip is mounted on the vertical post structures, and placed in concurrent abutting contact with the pedestal structures. The waferboard is fabricated by etching the substrate to form the front and side pedestal structures, and etching the substrate to define the grooves. In order to form the post structures, a polyimide material is deposited on the substrate using an appropriate mask.
Marvin Tabasky - Peabody MA Victor Cataldo - Wilmington MA Thomas W. Fitzgerald - Framingham MA Jagannath Chirravuri - Medfield MA Craig A. Armiento - Acton MA
Assignee:
GTE Laboratories Incorporated - Waltham MA
International Classification:
G02B 600 B44C 122
US Classification:
385 89
Abstract:
A waferboard assembly incorporates mechanical registration features into a substrate platform to facilitate the passive alignment of lasers integrated on a chip to fibers in integral contact with the substrate. The waferboard includes two front pedestal structures and one side pedestal structure, and two vertical post structures within a mounting region defined by the pedestal struutures. The laser chip is mounted on the vertical post structures, and placed in concurrent abutting contact with the pedestal structures. The waferboard is fabricated by etching the substrate to form the front and side pedestal structures, and etching the substrate to define the grooves. In order to form the post structures, a polyimide material is deposited on the substrate using an appropriate mask.
Method Of Selectively Producing Conductive Members On A Semiconductor Surface
Harry F. Lockwood - Waban MA Margaret B. Stern - Sudbury MA Marvin Tabasky - Peabody MA Victor Cataldo - Wilmington MA
Assignee:
Laboratories Incorporated - Waltham MA
International Classification:
H01L 2144
US Classification:
437200
Abstract:
Method of forming conductive members on a substrate of GaAs. Silicon is placed on the substrate surface in the desired pattern of the conductive members. The substrate is exposed to a gaseous atmosphere containing WF. sub. 6. WF. sub. 6 is reduced by the silicon causing tungsten to selectively deposit on the silicon but not on the exposed GaAs. The substrate is given a rapid thermal annealing treatment which causes the silicon-tungsten elements to form conductive members having a silicon rich layer at the bottom, an intermediate tungsten silicide layer, and a tungsten rich layer at the top. The conductive members form ohmic contacts with underlying heavily doped GaAs and rectifying Schottky barrier contacts with underlying lightly doped GaAs.
Marvin Tabasky - Peabody MA Victor Cataldo - Wilmington MA Thomas W. Fitzgerald - Framingham MA Jagannath Chirravuri - Medfield MA Craig A. Armiento - Acton MA Paul O. Haugsjaa - Acton MA
Assignee:
GTE Laboratories Incorporated - Waltham MA
International Classification:
H01L 21306 B44C 122 C03C 1500 C03C 2506
US Classification:
156633
Abstract:
A waferboard assembly incorporates mechanical registration features into a substrate platform to facilitate the passive alignment of lasers integrated on a chip to fibers in integral contact with the substrate. The waferboard includes two front pedestal structures and one side pedestal structure, and two vertical post structures within a mounting region defined by the pedestal structures. The laser chip is mounted on the vertical post structures, and placed in concurrent abutting contact with the pedestal structures. The waferboard is fabricated by etching the substrate to form the front and side pedestal structures, and etching the substrate to define the grooves. In order to form the post structures, a polyimide material is deposited on the substrate using an appropriate mask.