Yu U Jiang

US Patent:

20220270877, Aug 25, 2022

Filed:

Feb 10, 2022

Appl. No.:

17/650550

Inventors:

- Fremont CA, US
Samantha S.H. Tan - Newark CA, US
Yu Jiang - Sunnyvale CA, US
Hui-Jung Wu - Pleasanton CA, US
Richard Wise - Los Gatos CA, US
Yang Pan - Los Altos CA, US
Nader Shamma - Cupertino CA, US
Boris Volosskiy - San Jose CA, US

International Classification:

H01L 21/033
H01L 21/311
H01L 21/027
H01L 21/67
H01L 21/02
H01L 21/467
H01L 21/3065
H01L 21/3213
H01L 21/465

Abstract:

A method of processing a substrate includes: providing a substrate having one or more mandrels comprising a mandrel material, wherein a layer of a spacer material coats horizontal surfaces and sidewalls of the one or more mandrels; and etching and completely removing the layer of the spacer material from the horizontal surfaces of the one or more mandrels and thereby exposing the mandrel material, without completely removing the spacer material residing at the sidewalls of the one or more mandrels. The etching includes exposing the substrate to a plasma formed using a mixture comprising a first gas and a polymer-forming gas, and wherein the etching comprises forming a polymer on the substrate. Polymer-forming gas may include carbon (C) and hydrogen (H).

US Patent:

20230037208, Feb 2, 2023

Filed:

Dec 7, 2020

Appl. No.:

17/783264

Inventors:

- Fremont CA, US
Yu Jiang - San Jose CA, US
Narudha Tai Benyuhmin - Santa Clara CA, US

International Classification:

C23C 16/448
B33Y 80/00
B33Y 10/00
B33Y 40/20
B22F 10/28
B22F 10/64

Abstract:

In some examples, a liquid precursor vaporizer comprises an inlet, an outlet, and a first vaporizer core, the first vaporizer core including a plurality of nested cells defining a plurality of tortuous paths through which a liquid precursor can pass in a path between the inlet and the outlet of the liquid precursor vaporizer.

US Patent:

20230011537, Jan 12, 2023

Filed:

Dec 11, 2020

Appl. No.:

17/782588

Inventors:

- Fremont CA, US
Yu Jiang - San Jose CA, US
David Celli - Pleasanton CA, US
Steve Askin - Tracy CA, US

International Classification:

H01L 21/67
H01J 37/32

Abstract:

A consumable part and methods for tracking the consumable part includes embedding a radio frequency tag within a pocket created on a side of the consumable part that faces away from a process region defined within a process chamber of the processing tool and covering an opening of the pocket using a plug. The plug is laser fused along an interface formed between sidewalls of the plug and sidewalls of the pocket.

US Patent:

20210265163, Aug 26, 2021

Filed:

May 13, 2021

Appl. No.:

17/302850

Inventors:

- Fremont CA, US
Samantha S.H. Tan - Fremont CA, US
Yu Jiang - San Jose CA, US
Hui-Jung Wu - Pleasanton CA, US
Richard Wise - Los Gatos CA, US
Yang Pan - Los Altos CA, US
Nader Shamma - Cupertino CA, US
Boris Volosskiy - San Jose CA, US

International Classification:

H01L 21/033
H01L 21/311
H01L 21/027
H01L 21/67
H01L 21/02
H01L 21/467
H01L 21/3065
H01L 21/3213
H01L 21/465

Abstract:

Tin oxide film on a semiconductor substrate is etched selectively in a presence of photoresist by exposing the substrate to at least one of hydrogen-based chemistry and chlorine-based chemistry. In some implementations, a method of processing a semiconductor substrate starts by providing a semiconductor substrate having a patterned photoresist layer overlying a tin oxide layer. Next, openings are etched in the tin oxide layer using the patterned photoresist layer as a mask, and using at least one of a hydrogen-based etch chemistry and a chlorine-based etch chemistry. After the openings have been etched in the tin oxide layer, the photoresist layer is removed using an oxygen-based etch chemistry.

US Patent:

20200083044, Mar 12, 2020

Filed:

Nov 18, 2019

Appl. No.:

16/687142

Inventors:

- Fremont CA, US
Samantha S.H. Tan - Fremont CA, US
Yu Jiang - San Jose CA, US
Hui-Jung Wu - Pleasanton CA, US
Richard Wise - Los Gatos CA, US
Yang Pan - Los Altos CA, US
Nader Shamma - Cupertino CA, US
Boris Volosskiy - San Jose CA, US

International Classification:

H01L 21/033
H01L 21/311
H01L 21/02
H01L 21/465
H01L 21/3213
H01L 21/3065
H01L 21/467
H01L 21/67
H01L 21/027

Abstract:

Tin oxide film on a semiconductor substrate is etched selectively in a presence of silicon (Si), carbon (C), or a carbon-containing material (e.g., photoresist) by exposing the substrate to a process gas comprising hydrogen (H) and a hydrocarbon. The hydrocarbon significantly improves the etch selectivity. In some embodiments an apparatus for processing a semiconductor substrate includes a process chamber configured for housing the semiconductor substrate and a controller having program instructions on a non-transitory medium for causing selective etching of a tin oxide layer on a substrate in a presence of silicon, carbon, or a carbon-containing material by exposing the substrate to a plasma formed in a process gas that includes Hand a hydrocarbon.

US Patent:

20190279283, Sep 12, 2019

Filed:

Nov 20, 2018

Appl. No.:

16/197312

Inventors:

- San Jose CA, US
Jaya Kumar Murari - San Jose CA, US
Leo Hsieh - Mountain View CA, US
Yu Jiang - San Jose CA, US

International Classification:

G06Q 30/06
G06F 3/14
H04N 9/31

Abstract:

There is provided systems and method for a virtual display device for an interactive merchant sales environment. A device, such as a communication device, may allow a user to view virtual images of items in a user environment so that a user may view what their potential purchase may look like when placed into the user environment. The user environment may include a residential room, an office, a car interior, or other location where a user may place purchased items. The user may submit a request to view an item in the user environment to the device, which may communicate the request to a merchant or a service provider. The virtual image may correspond to digital image(s) of an item used to present a three dimensional virtual image of the item in the user environment. The device may receive the virtual image(s) and display them to the user.

US Patent:

20180240667, Aug 23, 2018

Filed:

Feb 12, 2018

Appl. No.:

15/894635

Inventors:

- Fremont CA, US
Samantha Tan - Fremont CA, US
Yu Jiang - San Jose CA, US
Hui-Jung Wu - Pleasanton CA, US
Richard Wise - Los Gatos CA, US
Yang Pan - Los Altos CA, US
Nader Shamma - Cupertino CA, US
Boris Volosskiy - San Jose CA, US

International Classification:

H01L 21/033
H01L 21/02
H01L 21/311
H01L 21/027
H01L 21/67

Abstract:

Tin oxide films are used as spacers and hardmasks in semiconductor device manufacturing. In one method, tin oxide layer is formed conformally over sidewalls and horizontal surfaces of protruding features on a substrate. A passivation layer is then formed over tin oxide on the sidewalls, and tin oxide is then removed from the horizontal surfaces of the protruding features without being removed at the sidewalls of the protruding features. The material of the protruding features is then removed while leaving the tin oxide that resided at the sidewalls of the protruding features, thereby forming tin oxide spacers. Hydrogen-based and chlorine-based dry etch chemistries are used to selectively etch tin oxide in a presence of a variety of materials. In another method a patterned tin oxide hardmask layer is formed on a substrate by forming a patterned layer over an unpatterned tin oxide and transferring the pattern to the tin oxide.

US Patent:

20160104235, Apr 14, 2016

Filed:

Oct 13, 2014

Appl. No.:

14/513178

Inventors:

- San Jose CA, US
Jaya Kumar Murari - San Jose CA, US
Leo Hsieh - Mountain View CA, US
Yu Jiang - San Jose CA, US

International Classification:

G06Q 30/06
G06T 19/20

Abstract:

There is provided systems and method for a virtual display device for an interactive merchant sales environment. A device, such as a communication device, may allow a user to view virtual images of items in a user environment so that a user may view what their potential purchase may look like when placed into the user environment. The user environment may include a residential room, an office, a car interior, or other location where a user may place purchased items. The user may submit a request to view an item in the user environment to the device, which may communicate the request to a merchant or a service provider. The virtual image may correspond to digital image(s) of an item used to present a three dimensional virtual image of the item in the user environment. The device may receive the virtual image(s) and display them to the user.